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Svechnikov, S. I., Okunev, O. V., Yagoubov, P. A., Gol'tsman, G. N., Voronov, B. M., Cherednichenko, S. I., et al. (1997). 2.5 THz NbN hot electron mixer with integrated tapered slot antenna. IEEE Trans. Appl. Supercond., 7(2), 3548–3551.
Abstract: A Hot Electron Bolometer (HEB) mixer for 2.5 THz utilizing a NbN thin film device, integrated with a Broken Linearly Tapered Slot Antenna (BLTSA), has been fabricated and is presently being tested. The NbN HEB device and the antenna were fabricated on a SiO2membrane. A 0.5 micrometer thick SiO2layer was grown by rf magnetron reactive sputtering on a GaAs wafer. The HEB device (phonon-cooled type) was produced as several parallel strips, 1 micrometer wide, from an ultrathin NbN film 4-7 nm thick, that was deposited onto the SiO2layer by dc magnetron reactive sputtering. The BLTSA was photoetched in a multilayer Ti-Au metallization. In order to strengthen the membrane, the front-side of the wafer was coated with a 5 micrometer thick polyimide layer just before the membrane formation. The last operation was anisotropic etching of the GaAs in a mixture of HNO3and H2O2.
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Smirnov, A. V., Larionov, P. A., Finkel, M. I., Maslennikov, S. N., Voronov, B. M., & Gol'tsman, G. N. (2008). NbZr films for THz phonon-cooled HEB mixers. In Proc. 19th Int. Symp. Space Terahertz Technol. (pp. 44–47). Groningen, Netherlands.
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Tarkhov, M., Claudon, J., Poizat, J. P., Korneev, A., Divochiy, A., Minaeva, O., et al. (2008). Ultrafast reset time of superconducting single photon detectors. Appl. Phys. Lett., 92(24), 241112 (1 to 3).
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Loudkov, D., Tong, C. Y. E., Blundell, R., Kaurova, N., Grishina, E., Voronov, B., et al. (2005). An investigation of the performance of the superconducting HEB슠mixer as a function of its RF슠embedding impedance. IEEE Trans. Appl. Supercond., 15(2), 472–475.
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Gol'tsman, G., Korneev, A., Minaeva, O., Antipov, A., Divochiy, A., Kaurova, N., et al. (2006). Middle-infrared to visible-light ultrafast superconducting single-photon detector. In Proc. ASC. Seattle.
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