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Delacour, C.; Claudon, J.; Poizat, J.-Ph.; Pannetier, B.; Bouchiat, V.; de Lamaestre, R. Espiau; Villegier, J.-C.; Tarkhov, M.; Korneev, A.; Voronov, B.; Gol'tsman, G. |
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Superconducting single photon detectors made by local oxidation with an atomic force microscope |
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Journal Article |
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2007 |
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Appl. Phys. Lett. |
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Appl. Phys. Lett. |
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90 |
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19 |
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191116 (1 t0 3) |
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SSPD |
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Abstract |
The authors present a fabrication technique of superconducting single photon detectors made by local oxidation of niobium nitride ultrathin films. Narrow superconducting meander lines are obtained by direct writing of insulating niobium oxynitride lines through the films using voltage-biased tip of an atomic force microscope. Due to the 30nm resolution of the lithographic technique, the filling factor of the meander line can be made substantially higher than detector of similar geometry made by electron beam lithography, thus leading to increased quantum efficiency. Single photon detection regime of these devices is demonstrated at 4.2K.
The authors thank J.-P. Maneval for stimulating discussions. This work has been partly supported by ACI Nanoscience from French Ministry of Research, D.G.A., by Grant No. 02.445.11.7434 of Russian Ministry of Education and Science, and by the European Commission under project “SINPHONIA,” Contract No. NMP4-CT-2005-16433. |
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0003-6951 |
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423 |
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Гершензон, Е. М.; Гершензон, М. Е.; Гольцман, Г. Н.; Семенов, А. Д.; Сергеев, А. В. |
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Неселективное воздействие электромагнитного излучения на сверхпроводящую пленку в резистивном состоянии |
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Journal Article |
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Year |
1982 |
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Письма в ЖЭТФ |
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Письма в ЖЭТФ |
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36 |
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7 |
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241-244 |
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russian |
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Duplicated as 1717 |
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MSPU @ s @ |
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225 |
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Gershenzon, E. M.; Gol'tsman, G. N.; Elantiev, A. I.; Karasik, B. S.; Potoskuev, S. E. |
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Intense electromagnetic radiation heating of electrons of a superconductor in the resistive state |
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Journal Article |
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1988 |
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Sov. J. Low Temp. Phys. |
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Sov. J. Low Temp. Phys. |
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14 |
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7 |
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414-420 |
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HEB |
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Duplicated as 1697 |
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236 |
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Gershenzon, E. M.; Goltsman, G. N.; Semenov, A. D.; Sergeev, A. V. |
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Limiting characteristic of fast superconducting bolometers |
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Journal Article |
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1989 |
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Sov. Phys.-Tech. Phys. |
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Sov. Phys.-Tech. Phys. |
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34 |
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195-199 |
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HEB |
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Теоретически и экспериментально исследовано физическое ограничение быстродействия сверхпроводящего болометра. Показано, что минимальная постоянная времени реализуется в условиях электронного разогрева и определяется процессом неупругого электрон-фонон- ного взаимодействия. Сформулированы требования кконструкции «электронного болометра» для достижения предельной чувствительности. Проведено сравнение характеристик электронного болометра и обычных болометров различных типов. |
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О предельных характеристиках быстродействующих серхпроводниковых болометров |
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237 |
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Гершензон, Е. М.; Гершензон, М. Е.; Гольцман, Г. Н.; Люлькин, А. М.; Семенов, А. Д.; Сергеев, А. В. |
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О предельных характеристиках быстродействующих серхпроводниковых болометров |
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Journal Article |
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1989 |
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Журнал технической физики |
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Журнал технической физики |
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59 |
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2 |
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111-120 |
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HEB |
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Теоретически и экспериментально исследовано физическое ограничение быстродействия сверхпроводящего болометра. Показано, что минимальная постоянная времени реализуется в условиях электронного разогрева и определяется процессом неупругого электрон-фонон- ного взаимодействия. Сформулированы требования кконструкции «электронного болометра» для достижения предельной чувствительности. Проведено сравнение характеристик электронного болометра и обычных болометров различных типов. |
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Russian |
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Duplicated as 237 |
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238 |
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