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Author | Sáysz, Wojciech; Guziewicz, Marek; Bar, Jan; Wegrzecki, Maciej; Grabiec, Piotr; Grodecki, Remigiusz; Wegrzecka, Iwona; Zwiller, Val; Milosnaya, Irina; Voronov, Boris; Gol’tsman, Gregory; Kitaygorsky, Jen; Sobolewski, Roman | ||||
Title | Superconducting NbN nanostructures for single photon quantum detectors | Type | Abstract | ||
Year | 2008 | Publication | Proc. 7-th Int. Conf. Ion Implantation and Other Applications of Ions and Electrons | Abbreviated Journal | Proc. 7-th Int. Conf. Ion Implantation and Other Applications of Ions and Electrons |
Volume | Issue | Pages | 160 | ||
Keywords | SSPD, SNSPD | ||||
Abstract | Practical quantum systems such as quantum communication (QC) or quantum measurement systems require detectors with high speed, high sensitivity, high quantum efficiency (QE), and short deadtimes along with precise timing characteristics and low dark counts. Superconducting single photon detectors (SSPDs) based on ultrathin meander type NbN nanostripes (operated at T=2-5K) are a new and highly promising type of devices fulfilling above requirements. In this paper we present results of the SSPDs nanostructure technological optimization. The base for our detector is thin-film (4nm) NbN layer deposited on 350- P m-thick sapphire substrate The active element of the detector is a meander- nanostructure made of 4-nm-thick and 100-nm-wide NbN stripe, covering 10 u 10 P m 2 area with the filling factor ~0,5. The NbN superconducting films were deposited on sapphire substrates by DC reactive magnetron sputtering whereas the meander element of the detector was patterned by the direct electron-beam lithography followed by reactive-ion etching. To enhance the SSPD efficiency at Ȝ = 1.55 P m, we have performed an approach to increase the absorption of the detector by integrating it with optical resonant cavity. An optical microcavity optimized for absorption of 1.55 P m photons was designed as an one-mirror resonator consisting of a Ȝ/4 dielectric layer and a metallic mirror. The microcavity was deposited on the top of the NbN SSPD meander. The resonator was formed by the dielectric SiO 2 layer and metal mirror made of gold or palladium. Microcavity layers were deposited using a magnetron sputtering system. | ||||
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Call Number | Serial | 1409 | |||
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Author | de Lara, D. Perez; Ejrnaes, M.; Casaburi, A.; Lisitskiy, M.; Cristiano, R.; Pagano, S.; Gaggero, A.; Leoni, R.; Golt’sman, G.; Voronov, B. | ||||
Title | Feasibility investigation of NbN nanowires as detector in time-of-flight mass spectrometers for macromolecules of interest in biology (proteins) | Type | Journal Article | ||
Year | 2008 | Publication | J. Low Temp. Phys. | Abbreviated Journal | J. Low Temp. Phys. |
Volume | 151 | Issue | 3-4 | Pages | 771-776 |
Keywords | NbN SSPD, SNSPD, nanowires | ||||
Abstract | We are investigating the possibility of using NbN nanowires as detectors in time-of-flight mass spectrometers for investigation of macromolecules of interest in biology (proteins). NbN nanowires could overcome the two major drawbacks encountered so far by cryogenic detectors, namely the low working temperature in the mK region and the slow temporal response. In fact, NbN nanowires can work at 5 K and the response time is at least a factor 10–100 better than that of other cryogenic detectors. We present a feasibility study based on a numerical code to calculate the response of a NbN nanowire. The parameter space is investigated at different energies from IR to macromolecules (i.e. from eV to keV) in order to understand if larger value of film thickness and width can be used for the keV energy region. We also present preliminary experimental results of irradiation with X-ray photons of NbN to simulate the effect of macromolecules of the same energy. | ||||
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ISSN | 0022-2291 | ISBN | Medium | ||
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Notes | Approved | no | |||
Call Number | Serial | 1410 | |||
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Author | Okunev, O.; Chulkova, G.; Milostnaya, I.; Antipov, A.; Smirnov, K.; Morozov, D.; Korneev, A.; Voronov, B.; Gol’tsman, G.; Slysz, W.; Wegrzecki, M.; Bar, J.; Grabiec, P.; Górska, M.; Pearlman, A.; Cross, A.; Kitaygorsky, J.; Sobolewski, R. | ||||
Title | Registration of infrared single photons by a two-channel receiver based on fiber-coupled superconducting single-photon detectors | Type | Conference Article | ||
Year | 2008 | Publication | Proc. SPIE | Abbreviated Journal | Proc. SPIE |
Volume | 7009 | Issue | Pages | 70090V (1 to 8) | |
Keywords | SSPD, SNSPD, single-photon detectors, superconductors, superconducting nanost | ||||
Abstract | Single-photon detectors (SPDs) are the foundation of all quantum communications (QC) protocols. Among different classes of SPDs currently studied, NbN superconducting SPDs (SSPDs) are established as the best devices for ultrafast counting of single photons in the infrared (IR) wavelength range. The SSPDs are nanostructured, 100 μm2 in total area, superconducting meanders, patterned by electron lithography in ultra-thin NbN films. Their operation has been explained within a phenomenological hot-electron photoresponse model. We present the design and performance of a novel, two-channel SPD receiver, based on two fiber-coupled NbN SSPDs. The receivers have been developed for fiber-based QC systems, operational at 1.3 μm and 1.55 μm telecommunication wavelengths. They operate in the temperature range from 4.2 K to 2 K, in which the NbN SSPDs exhibit their best performance. The receiver unit has been designed as a cryostat insert, placed inside a standard liquid-heliumstorage dewar. The input of the receiver consists of a pair of single-mode optical fibers, equipped with the standard FC connectors and kept at room temperature. Coupling between the SSPD and the fiber is achieved using a specially designed, precise micromechanical holder that places the fiber directly on top of the SSPD nanostructure. Our receivers achieve the quantum efficiency of up to 7% for near-IR photons, with the coupling efficiency of about 30%. The response time was measured to be < 1.5 ns and it was limited by our read-out electronics. The jitter of fiber-coupled SSPDs is < 35 ps and their dark-count rate is below 1s-1. The presented performance parameters show that our single-photon receivers are fully applicable for quantum correlation-type QC systems, including practical quantum cryptography. | ||||
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Publisher | SPIE | Place of Publication | Editor | Sukhoivanov, I.A.; Svich, V.A.; Shmaliy, Y.S. | |
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Call Number | Serial | 1413 | |||
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Author | Jukna, A.; Kitaygorsky, J.; Pan, D.; Cross, A.; Perlman, A.; Komissarov, I.; Sobolewski, R.; Okunev, O.; Smirnov, K.; Korneev, A.; Chulkova, G.; Milostnaya, I.; Voronov, B.; Gol'tsman, G. | ||||
Title | Dynamics of hotspot formation in nanostructured superconducting stripes excited with single photons | Type | Journal Article | ||
Year | 2008 | Publication | Acta Physica Polonica A | Abbreviated Journal | Acta Physica Polonica A |
Volume | 113 | Issue | 3 | Pages | 955-958 |
Keywords | SSPD, SNSPD | ||||
Abstract | Dynamics of a resistive hotspot formation by near-infrared-wavelength single photons in nanowire-type superconducting NbN stripes was investigated. Numerical simulations of ultrafast thermalization of photon-excited nonequilibrium quasiparticles, their multiplication and out-diffusion from a site of the photon absorption demonstrate that 1.55 μm wavelength photons create in an ultrathin, two-dimensional superconducting film a resistive hotspot with the diameter which depends on the photon energy, and the nanowire temperature and biasing conditions. Our hotspot model indicates that under the subcritical current bias of the 2D stripe, the electric field penetrates the superconductor at the hotspot boundary, leading to suppression of the stripe superconducting properties and accelerated development of a voltage transient across the stripe. | ||||
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Notes | Approved | no | |||
Call Number | Serial | 1414 | |||
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Author | Ejrnaes, M.; Cristiano, R.; Quaranta, O.; Pagano, S.; Gaggero, A.; Mattioli, F.; Leoni, R.; Voronov, B.; Gol’tsman, G. | ||||
Title | A cascade switching superconducting single photon detector | Type | Journal Article | ||
Year | 2007 | Publication | Appl. Phys. Lett. | Abbreviated Journal | Appl. Phys. Lett. |
Volume | 91 | Issue | 26 | Pages | 262509 (1 to 3) |
Keywords | SSPD, SNSPD, parallel-wire | ||||
Abstract | We have realized superconducting single photon detectors with reduced inductance and increased signal pulse amplitude. The detectors are based on a parallel connection of ultrathin NbN nanowires with a common bias inductance. When properly biased, an absorbed photon induces a cascade switch of all the parallel wires generating a signal pulse amplitude of 2mV. The parallel wire configuration lowers the detector inductance and reduces the response time well below 1ns. This work was performed in the framework of the EU project “SINPHONIA” NMP4-CT-2005-016433. |
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ISSN | 0003-6951 | ISBN | Medium | ||
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Notes | Approved | no | |||
Call Number | Serial | 1418 | |||
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Author | Dauler, E. A.; Robinson, B. S.; Kerman, A. J.; Yang, J. K. W.; Rosfjord, E. K. M.; Anant, V.; Voronov, B.; Gol'tsman, G.; Berggren, K. K. | ||||
Title | Multi-element superconducting nanowire single-photon detector | Type | Journal Article | ||
Year | 2007 | Publication | IEEE Trans. Appl. Supercond. | Abbreviated Journal | IEEE Trans. Appl. Supercond. |
Volume | 17 | Issue | 2 | Pages | 279-284 |
Keywords | SSPD, SNSPD | ||||
Abstract | A multi-element superconducting nanowire single photon detector (MESNSPD) is presented that consists of multiple independently-biased superconducting nanowire single photon detector (SNSPD) elements that form a continuous active area. A two-element SNSPD has been fabricated and tested, showing no measurable crosstalk between the elements, sub-50-ps relative timing jitter, and four times the maximum counting rate of a single SNSPD with the same active area. The MESNSPD can have a larger active area and higher speed than a single-element SNSPD and the input optics can be designed so that the detector provides spatial, spectral or photon number resolution. | ||||
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ISSN | 1051-8223 | ISBN | Medium | ||
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Notes | Approved | no | |||
Call Number | Serial | 1428 | |||
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Author | Kerman, A. J.; Dauler, E. A.; Yang, J. K. W.; Rosfjord, K. M.; Anant, V.; Berggren, K. K.; Gol’tsman, G. N.; Voronov, B. M. | ||||
Title | Constriction-limited detection efficiency of superconducting nanowire single-photon detectors | Type | Journal Article | ||
Year | 2007 | Publication | Appl. Phys. Lett. | Abbreviated Journal | Appl. Phys. Lett. |
Volume | 90 | Issue | 10 | Pages | 101110 (1 to 3) |
Keywords | SSPD, SNSPD | ||||
Abstract | We investigate the source of the large variations in the observed detection efficiencies of superconducting nanowire single-photon detectors between many nominally identical devices. Through both electrical and optical measurements, we infer that these variations arise from “constrictions:” highly localized regions of the nanowires where the effective cross-sectional area for superconducting current is reduced. These constrictions limit the bias-current density to well below its critical value over the remainder of the wire, and thus prevent the detection efficiency from reaching the high values that occur in these devices when they are biased near the critical current density. This work is sponsored by the United States Air Force under Contract No. FA8721-05-C-0002. |
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ISSN | 0003-6951 | ISBN | Medium | ||
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Notes | Approved | no | |||
Call Number | Serial | 1433 | |||
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Author | Słysz, W.; Wegrzecki, M.; Bar, J.; Grabiec, P.; Górska, M.; Zwiller, V.; Latta, C.; Böhi, P.; Pearlman, A.J.; Cross, A.S.; Pan, D.; Kitaygorsky, J.; Komissarov, I.; Verevkin, A.; Milostnaya, I.; Korneev, A.; Minayeva, O.; Chulkova, G.; Smirnov, K.; Voronov, B.; Gol’tsman, G.N.; Sobolewski, R. | ||||
Title | Fibre-coupled, single photon detector based on NbN superconducting nanostructures for quantum communications | Type | Journal Article | ||
Year | 2007 | Publication | J. Modern Opt. | Abbreviated Journal | J. Modern Opt. |
Volume | 54 | Issue | 2-3 | Pages | 315-326 |
Keywords | NbN SSPD, SNSPD | ||||
Abstract | We present a novel, two-channel, single photon receiver based on two fibre-coupled, NbN, superconducting, single photon detectors (SSPDs). The SSPDs are nanostructured superconducting meanders and are known for ultrafast and efficient detection of visible-to-infrared photons. Coupling between the NbN detector and optical fibre was achieved using a micromechanical photoresist ring placed directly over the SSPD, holding the fibre in place. With this arrangement, we obtained coupling efficiencies up to ∼30%. Our experimental results showed that the best receiver had a near-infrared system quantum efficiency of 0.33% at 4.2 K. The quantum efficiency increased exponentially with the photon energy increase, reaching a few percent level for visible-light photons. The photoresponse pulses of our devices were limited by the meander high kinetic inductance and had the rise and fall times of approximately 250 ps and 5 ns, respectively. The receiver's timing jitter was in the 37 to 58 ps range, approximately 2 to 3 times larger than in our older free-space-coupled SSPDs. We stipulate that this timing jitter is in part due to optical fibre properties. Besides quantum communications, the two-detector arrangement should also find applications in quantum correlation experiments. | ||||
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ISSN | 0950-0340 | ISBN | Medium | ||
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Notes | Approved | no | |||
Call Number | Serial | 1434 | |||
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Author | Tarkhov, M.; Morozov, D.; Mauskopf, P.; Seleznev, V.; Korneev, A.; Kaurova, N.; Rubtsova, I.; Minaeva, O.; Voronov, B.; Goltsman, G. | ||||
Title | Single photon counting detector for THz radioastronomy | Type | Conference Article | ||
Year | 2006 | Publication | Proc. 17th Int. Symp. Space Terahertz Technol. | Abbreviated Journal | Proc. 17th Int. Symp. Space Terahertz Technol. |
Volume | Issue | Pages | 119-122 | ||
Keywords | NbN SSPD, SNSPD | ||||
Abstract | In this paper we present the results of the research on the superconducting NbN-ultrathin-film single- photon detectors (SSPD) which are capable to detect single quanta in middle IR range. The detection mechanism is based on the hotspot formation in quasi-two-dimensional superconducting structures upon photon absorption. Spectral measurements showed that up to 5.7 gm wavelength (52 THz) the SSPD exhibits single-photon sensitivity. Reduction of operation temperature to 1.6 K allowed us to measure quantum efficiency of -4% at 60 THz. Although further decrease of the operation temperature far below 1 K does not lead to any significant increase of quantum efficiency. We expect that the improvement of the SSPD's performance at reduced operation temperature will make SSPD a practical detector with high characteristics for much lower THz frequencies as well. | ||||
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Call Number | Serial | 1438 | |||
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Author | Smirnov, K.; Korneev, A.; Minaeva, O.; Divochij, A.; Rubtsova, I.; Antipov, A.; Ryabchun, S.; Okunev, O.; Milostnaya, I.; Chulkova, G.; Voronov, B.; Kaurova, N.; Seleznev, V.; Korotetskaya, Y.; Gol’tsman, G. | ||||
Title | Superconducting single-photon detector for near- and middle IR wavelength range | Type | Conference Article | ||
Year | 2006 | Publication | Proc. 16th Int. Crimean Microwave and Telecommunication Technology | Abbreviated Journal | Proc. 16th Int. Crimean Microwave and Telecommunication Technology |
Volume | 2 | Issue | Pages | 684-685 | |
Keywords | NbN SSPD, SNSPD | ||||
Abstract | Presented in this paper are the results of research of NbN-film superconducting single-photon detector. At 2 K temperature, quantum efficiency in the visible light (0.56 mum) reaches 30-40 %. With the wavelength increase quantum efficiency decreases and comes to 20% at 1.55 mum and 0.02% at 5.6 mum. Minimum dark counts rate is 2times10-4s-1. The jitter of detector is 35 ps. The detector was successfully implemented for integrated circuits non-invasive optical testing. It is also perspective for quantum cryptography systems | ||||
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Language | Russian | Summary Language | Original Title | ||
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Call Number | Serial | 1447 | |||
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Author | Słysz, W.; Węgrzecki, M.; Bar, J.; Grabiec, P.; Górska, M.; Zwiller, V.; Latta, C.; Bohi, P.; Milostnaya, I.; Minaeva, O.; Antipov, A.; Okunev, O.; Korneev, A.; Smirnov, K.; Voronov, B.; Kaurova, N.; Gol’tsman, G.; Pearlman, A.; Cross, A.; Komissarov, I.; Verevkin, A.; Sobolewski, R. | ||||
Title | Fiber-coupled single-photon detectors based on NbN superconducting nanostructures for practical quantum cryptography and photon-correlation studies | Type | Journal Article | ||
Year | 2006 | Publication | Appl. Phys. Lett. | Abbreviated Journal | Appl. Phys. Lett. |
Volume | 88 | Issue | 26 | Pages | 261113 (1 to 3) |
Keywords | SSPD, SNSPD | ||||
Abstract | We have fabricated and tested a two-channel single-photon detector system based on two fiber-coupled superconducting single-photon detectors (SSPDs). Our best device reached the system quantum efficiency of 0.3% in the 1540-nm telecommunication wavelength with a fiber-to-detector coupling factor of about 30%. The photoresponse consisted of 2.5-ns-wide voltage pulses with a rise time of 250ps and timing jitter below 40ps. The overall system response time, measured as a second-order, photon cross-correlation function, was below 400ps. Our SSPDs operate at 4.2K inside a liquid-helium Dewar, but their optical fiber inputs and electrical outputs are at room temperature. Our two-channel detector system should find applications in practical quantum cryptography and in antibunching-type quantum correlation measurements. The authors would like to thank Dr. Marc Currie for his assistance in early time-resolved photoresponse measurements and Professor Atac Imamoglu for his support. This work was supported by the Polish Ministry of Science under Project No. 3 T11B 052 26 (Warsaw), RFBR 03-02-17697 and INTAS 03-51-4145 grants (Moscow), CRDF Grant No. RE2-2531-MO-03 (Moscow), RE2-2529-MO-03 (Moscow and Rochester), and US AFOSR FA9550-04-1-0123 (Rochester). Additional funding was provided by the grants from the MIT Lincoln Laboratory and BBN Technologies Corp. |
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ISSN | 0003-6951 | ISBN | Medium | ||
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Notes | Approved | no | |||
Call Number | Serial | 1449 | |||
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Author | Milostnaya, I.; Korneev, A.; Rubtsova, I.; Seleznev, V.; Minaeva, O.; Chulkova, G.; Okunev, O.; Voronov, B.; Smirnov, K.; Gol'tsman, G.; Slysz, W.; Wegrzecki, M.; Guziewicz, M.; Bar, J.; Gorska, M.; Pearlman, A.; Kitaygorsky, J.; Cross, A.; Sobolewski, R. | ||||
Title | Superconducting single-photon detectors designed for operation at 1.55-µm telecommunication wavelength | Type | Conference Article | ||
Year | 2006 | Publication | J. Phys.: Conf. Ser. | Abbreviated Journal | J. Phys.: Conf. Ser. |
Volume | 43 | Issue | Pages | 1334-1337 | |
Keywords | NbN SSPD, SNSPD | ||||
Abstract | We report on our progress in development of superconducting single-photon detectors (SSPDs), specifically designed for secure high-speed quantum communications. The SSPDs consist of NbN-based meander nanostructures and operate at liquid helium temperatures. In general, our devices are capable of GHz-rate photon counting in a spectral range from visible light to mid-infrared. The device jitter is 18 ps and dark counts can reach negligibly small levels. The quantum efficiency (QE) of our best SSPDs for visible-light photons approaches a saturation level of ~30-40%, which is limited by the NbN film absorption. For the infrared range (1.55µm), QE is ~6% at 4.2 K, but it can be significantly improved by reduction of the operation temperature to the 2-K level, when QE reaches ~20% for 1.55-µm photons. In order to further enhance the SSPD efficiency at the wavelength of 1.55 µm, we have integrated our detectors with optical cavities, aiming to increase the effective interaction of the photon with the superconducting meander and, therefore, increase the QE. A successful effort was made to fabricate an advanced SSPD structure with an optical microcavity optimized for absorption of 1.55 µm photons. The design consisted of a quarter-wave dielectric layer, combined with a metallic mirror. Early tests performed on relatively low-QE devices integrated with microcavities, showed that the QE value at the resonator maximum (1.55-µm wavelength) was of the factor 3-to-4 higher than that for a nonresonant SSPD. Independently, we have successfully coupled our SSPDs to single-mode optical fibers. The completed receivers, inserted into a liquid-helium transport dewar, reached ~1% system QE for 1.55 µm photons. The SSPD receivers that are fiber-coupled and, simultaneously, integrated with resonators are expected to be the ultimate photon counters for optical quantum communications. | ||||
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ISSN | 1742-6588 | ISBN | Medium | ||
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Notes | Approved | no | |||
Call Number | Serial | 1450 | |||
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Author | Kerman, A. J.; Dauler, E. A.; Keicher, W. E.; Yang, J. K. W.; Berggren, K. K.; Gol’tsman, G.; Voronov, B. | ||||
Title | Kinetic-inductance-limited reset time of superconducting nanowire photon counters | Type | Journal Article | ||
Year | 2006 | Publication | Appl. Phys. Lett. | Abbreviated Journal | Appl. Phys. Lett. |
Volume | 88 | Issue | 11 | Pages | 111116 (1 to 3) |
Keywords | NbN SSPD, SNSPD | ||||
Abstract | We investigate the recovery of superconducting NbN-nanowire photon counters after detection of an optical pulse at a wavelength of 1550nm, and present a model that quantitatively accounts for our observations. The reset time is found to be limited by the large kinetic inductance of these nanowires, which forces a tradeoff between counting rate and either detection efficiency or active area. Devices of usable size and high detection efficiency are found to have reset times orders of magnitude longer than their intrinsic photoresponse time. The authors acknowledge D. Oates and W. Oliver (MIT Lincoln Laboratory), S.W. Nam, A. Miller, and R. Hadfield (NIST) and R. Sobolewski, A. Pearlman, and A. Verevkin (University of Rochester) for helpful discussions and technical assistance. This work made use of MIT’s shared scanning-electron-beam-lithography facility in the Research Laboratory of Electronics. This work is sponsored by the United States Air Force under Air Force Contract No. FA8721-05-C-0002. Opinions, interpretations, recommendations and conclusions are those of the authors and are not necessarily endorsed by the United States Government. |
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ISSN | 0003-6951 | ISBN | Medium | ||
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Notes | Approved | no | |||
Call Number | Serial | 1453 | |||
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Author | Pearlman, A.; Cross, A.; Slysz, W.; Zhang, J.; Verevkin, A.; Currie, M.; Korneev, A.; Kouminov, P.; Smirnov, K.; Voronov, B.; Gol’tsman, G.; Sobolewski, R. | ||||
Title | Gigahertz counting rates of NbN single-photon detectors for quantum communications | Type | Journal Article | ||
Year | 2005 | Publication | IEEE Trans. Appl. Supercond. | Abbreviated Journal | IEEE Trans. Appl. Supercond. |
Volume | 15 | Issue | 2 | Pages | 579-582 |
Keywords | NbN SSPD, SNSPD | ||||
Abstract | We report on the GHz counting rate and jitter of our nanostructured superconducting single-photon detectors (SSPDs). The devices were patterned in 4-nm-thick and about 100-nm-wide NbN meander stripes and covered a 10-/spl mu/m/spl times/10-/spl mu/m area. We were able to count single photons at both the visible and infrared telecommunication wavelengths at rates of over 2 GHz with a timing jitter of below 18 ps. We also present the model for the origin of the SSPD switching dynamics and jitter, based on the time-delay effect in the phase-slip-center formation mechanism during the detector photoresponse process. With further improvements in our readout electronics, we expect that our SSPDs will reach counting rates of up to 10 GHz. An integrated quantum communications receiver based on two fiber-coupled SSPDs and operating at 1550-nm wavelength is also presented. | ||||
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ISSN | 1558-2515 | ISBN | Medium | ||
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Notes | Approved | no | |||
Call Number | Serial | 1465 | |||
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Author | Yang, J. K. W.; Dauler, E.; Ferri, A.; Pearlman, A.; Verevkin, A.; Gol’tsman, G.; Voronov, B.; Sobolewski, R.; Keicher, W. E.; Berggren, K. K. | ||||
Title | Fabrication development for nanowire GHz-counting-rate single-photon detectors | Type | Journal Article | ||
Year | 2005 | Publication | IEEE Trans. Appl. Supercond. | Abbreviated Journal | IEEE Trans. Appl. Supercond. |
Volume | 15 | Issue | 2 | Pages | 626-630 |
Keywords | NbN SSPD, SNSPD | ||||
Abstract | We have developed a fabrication process for GHz-counting-rate, single-photon, high-detection-efficiency, NbN, nanowire detectors. We have demonstrated two processes for the device patterning, one based on the standard polymethylmethacrylate (PMMA) organic positive-tone electron-beam resist, and the other based on the newer hydrogen silsesquioxane (HSQ) negative-tone spin-on-glass resist. The HSQ-based process is simple and robust, providing high resolution and the prospect of high fill-factors. Initial testing results show superconductivity in the films, and suggest that the devices exhibit photosensitivity. | ||||
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ISSN | 1558-2515 | ISBN | Medium | ||
Area | Expedition | Conference | |||
Notes | Approved | no | |||
Call Number | Serial | 1466 | |||
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