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Author Title Year Publication DOI
Titova, N. A.; Baeva, E. M.; Kardakova, A. I.; Goltsman, G. N. Fabrication of NbN/SiNx:H/SiO2 membrane structures for study of heat conduction at low temperatures 2020 J. Phys.: Conf. Ser. 10.1088/1742-6596/1695/1/012190