| Records |
| Author |
Finkel, M.; Thierschmann, H. R.; Galatro, L.; Katan, A. J.; Thoen, D. J.; de Visser, P. J.; Spirito, M.; Klapwijk, T. M. |
| Title |
Branchline and directional THz coupler based on PECVD SiNx-technology |
Type |
Conference Article |
| Year |
2016 |
Publication  |
41st IRMMW-THz |
Abbreviated Journal |
41st IRMMW-THz |
| Volume |
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Issue |
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Pages |
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| Keywords |
microstrip, fixtures, coplanar waveguides, couplers, standards, probes, dielectrics |
| Abstract |
A fabrication technology to realize THz microstrip lines and passive circuit components is developed and tested making use of a plasma-enhanced chemical vapor deposition grown silicon nitride (PECVD SiNx) dielectric membrane. We use 2 μm thick SiNx and 300 nm thick gold layers on sapphire substrates. We fabricate a set of structures for thru-reflect-line (TRL) calibration, with the reflection standard implemented as a short through the via. We find losses of 9.5 dB/mm at 300 GHz for a 50 Ohm line. For a branchline coupler we measure 2.5 dB insertion loss, 1 dB amplitude imbalance and 21 dB isolation. Good control over the THz lines parameters is proven by similar performance of a set of 5 structures. The directional couplers show -14 dB transmission to the coupled port, -24 dB to the isolated port and -25 dB in reflection. The SiNx membrane, used as a dielectric, is compatible with atomic force microscopy (AFM) cantilevers allowing the application of this technology to the development of a THz near-field microscope. |
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Series Title |
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Abbreviated Series Title |
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Series Issue |
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Edition |
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| ISSN |
2162-2035 |
ISBN |
978-1-4673-8485-8 |
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Expedition |
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| Notes |
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Approved |
no |
| Call Number |
7758586 |
Serial |
1295 |
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| Author |
Goltsman, G. N.; Korneev, A. A.; Finkel, M. I.; Divochiy, A. V.; Florya, I. N.; Korneeva, Y. P.; Tarkhov, M. A.; Ryabchun, S. A.; Tretyakov, I. V.; Maslennikov, S. N.; Kaurova, N. S.; Chulkova, G. M.; Voronov, B. M. |
| Title |
Superconducting hot-electron bolometer as THz mixer, direct detector and IR single-photon counter |
Type |
Abstract |
| Year |
2010 |
Publication |
35th Int. Conf. Infrared, Millimeter, and Terahertz Waves |
Abbreviated Journal |
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| Volume |
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Issue |
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Pages |
1-1 |
| Keywords |
SSPD, SNSPD, HEB |
| Abstract |
We present a new generation of superconducting single-photon detectors (SSPDs) and hot-electron superconducting sensors with record characteristic for many terahertz and optical applications. |
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Edition |
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| ISSN |
2162-2027 |
ISBN |
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Approved |
no |
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RPLAB @ sasha @ goltsman2010superconducting |
Serial |
1028 |
| Permanent link to this record |
