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Author | Title | Year | Publication ![]() |
DOI |
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Zolotov, P. I.; Divochiy, A. V.; Vakhtomin, Y. B.; Lubenchenko, A. V.; Morozov, P. V.; Shurkaeva, I. V.; Smirnov, K. V. | Influence of sputtering parameters on the main characteristics of ultra-thin vanadium nitride films | 2018 | J. Phys.: Conf. Ser. | 10.1088/1742-6596/1124/5/051030 |