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Author | Elmanova, A.; An, P.; Kovalyuk, V.; Golikov, A.; Elmanov, I.; Goltsman, G. | ||||
Title | Study of silicon nitride O-ring resonator for gas-sensing applications | Type | Conference Article | ||
Year | 2020 | Publication | J. Phys.: Conf. Ser. | Abbreviated Journal | J. Phys.: Conf. Ser. |
Volume | 1695 | Issue | Pages | 012124 | |
Keywords | silicon nitride O-ring resonator, ORR | ||||
Abstract | In this work, we experimentally studied the influence of different gaseous surroundings on silicon nitride O-ring resonator transmission. We compared the obtained results with numerical calculations and theoretical analysis and found a good agreement between them. Our results have a great potential for gas sensing applications, where a compact footprint and high efficiency are desired simultaneously. | ||||
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ISSN | 1742-6588 | ISBN | Medium | ||
Area | Expedition | Conference | |||
Notes | Approved | no | |||
Call Number | Serial | 1176 | |||
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