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Rosfjord, K. M.; Yang, J. K. W.; Dauler, E. A.; Anant, V.; Berggren, K. K.; Kerman, A. J.; Voronov, B. M.; Gol’tsman, G. N. |
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Increased detection efficiencies of nanowire single-photon detectors by integration of an optical cavity and anti-reflection coating |
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2006 |
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CLEO/QELS |
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CLEO/QELS |
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JTuF2 (1 to 2) |
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SSPD, SNSPD |
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We fabricate and test superconducting NbN-nanowire single-photon detectors with an integrated optical cavity and anti-reflection coating. We design the cavity and coating such as to maximize absorption in the NbN film of the detector. |
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2006 Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference |
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1452 |
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Yang, J. K. W.; Dauler, E.; Ferri, A.; Pearlman, A.; Verevkin, A.; Gol’tsman, G.; Voronov, B.; Sobolewski, R.; Keicher, W. E.; Berggren, K. K. |
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Fabrication development for nanowire GHz-counting-rate single-photon detectors |
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Journal Article |
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2005 |
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IEEE Trans. Appl. Supercond. |
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IEEE Trans. Appl. Supercond. |
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15 |
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2 |
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626-630 |
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NbN SSPD, SNSPD |
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We have developed a fabrication process for GHz-counting-rate, single-photon, high-detection-efficiency, NbN, nanowire detectors. We have demonstrated two processes for the device patterning, one based on the standard polymethylmethacrylate (PMMA) organic positive-tone electron-beam resist, and the other based on the newer hydrogen silsesquioxane (HSQ) negative-tone spin-on-glass resist. The HSQ-based process is simple and robust, providing high resolution and the prospect of high fill-factors. Initial testing results show superconductivity in the films, and suggest that the devices exhibit photosensitivity. |
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1558-2515 |
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1466 |
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