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Author | Title | Year | Publication | Volume | Pages |
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Elmanov, I.; Elmanova, A.; Komrakova, S.; Golikov, A.; Kaurova, N.; Kovalyuk, V.; Goltsman, G.; Arakelyan, S.; Evlyukhin, A.; Kalachev, A.; Naumov, A. | Method for determination of resists parameters for photonic – integrated circuits e-beam lithography on silicon nitride platform | 2019 | EPJ Web Conf. | 220 | 03012 |