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Elmanova A, An P, Kovalyuk V, Golikov A, Elmanov I, Goltsman G. Study of silicon nitride O-ring resonator for gas-sensing applications. In: J. Phys.: Conf. Ser. Vol 1695.; 2020. 012124.
Abstract: In this work, we experimentally studied the influence of different gaseous surroundings on silicon nitride O-ring resonator transmission. We compared the obtained results with numerical calculations and theoretical analysis and found a good agreement between them. Our results have a great potential for gas sensing applications, where a compact footprint and high efficiency are desired simultaneously.
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