|
Zolotov, P. I.; Divochiy, A. V.; Vakhtomin, Y. B.; Lubenchenko, A. V.; Morozov, P. V.; Shurkaeva, I. V.; Smirnov, K. V. |
Influence of sputtering parameters on the main characteristics of ultra-thin vanadium nitride films |
2018 |
J. Phys.: Conf. Ser. |
1124 |
051030 |
|