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Author
Title
Year
Publication
Volume
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Titova, N. A.
;
Baeva, E. M.
;
Kardakova, A. I.
;
Goltsman, G. N.
Fabrication of NbN/SiN
x
:H/SiO
2
membrane structures for study of heat conduction at low temperatures
2020
J. Phys.: Conf. Ser.
1695
012190
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