|
Beebe, M. R.; Beringer, D. B.; Burton, M. C.; Yang, K.; Lukaszew, R. A. |
Stoichiometry and thickness dependence of superconducting properties of niobium nitride thin films |
2016 |
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films |
10.1116/1.4940132 |
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