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Rosfjord KM, Yang JKW, Dauler EA, Kerman AJ, Vikas Anant, Voronov BM, et al. Nanowire Single-photon detector with an integrated optical cavity and anti-reflection coating. Opt Express. 2006;14(2):527–34.
Abstract: We have fabricated and tested superconducting single-photon detectors and demonstrated detection efficiencies of 57% at 1550-nm wavelength and 67% at 1064 nm. In addition to the peak detection efficiency, a median detection efficiency of 47.7% was measured over 132 devices at 1550 nm. These measurements were made at 1.8K, with each device biased to 97.5% of its critical current. The high detection efficiencies resulted from the addition of an optical cavity and anti-reflection coating to a nanowire photodetector, creating an integrated nanoelectrophotonic device with enhanced performance relative to the original device. Here, the testing apparatus and the fabrication process are presented. The detection efficiency of devices before and after the addition of optical elements is also reported.
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Delacour C, Claudon J, Poizat J-P, Pannetier B, Bouchiat V, de Lamaestre RE, et al. Superconducting single photon detectors made by local oxidation with an atomic force microscope. Appl Phys Lett. 2007;90(19):191116 (1 t0 3).
Abstract: The authors present a fabrication technique of superconducting single photon detectors made by local oxidation of niobium nitride ultrathin films. Narrow superconducting meander lines are obtained by direct writing of insulating niobium oxynitride lines through the films using voltage-biased tip of an atomic force microscope. Due to the 30nm resolution of the lithographic technique, the filling factor of the meander line can be made substantially higher than detector of similar geometry made by electron beam lithography, thus leading to increased quantum efficiency. Single photon detection regime of these devices is demonstrated at 4.2K.
The authors thank J.-P. Maneval for stimulating discussions. This work has been partly supported by ACI Nanoscience from French Ministry of Research, D.G.A., by Grant No. 02.445.11.7434 of Russian Ministry of Education and Science, and by the European Commission under project “SINPHONIA,” Contract No. NMP4-CT-2005-16433.
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Smirnov K, Korneev A, Minaeva O, Divochiy A, Tarkhov M, Ryabchun S, et al. Ultrathin NbN film superconducting single-photon detector array. In: J. Phys.: Conf. Ser. Vol 61.; 2007. p. 1081–5.
Abstract: We report on the fabrication process of the 2 × 2 superconducting single-photon detector (SSPD) array. The SSPD array is made from ultrathin NbN film and is operated at liquid helium temperatures. Each detector is a nanowire-based structure patterned by electron beam lithography process. The advances in fabrication technology allowed us to produce highly uniform strips and preserve superconducting properties of the unpatterned film. SSPD exhibit up to 30% quantum efficiency in near infrared and up to 1% at 5-μm wavelength. Due to 120 MHz counting rate and 18 ps jitter, the time-domain multiplexing read-out is proposed for large scale SSPD arrays. Single-pixel SSPD has already found a practical application in non-invasive testing of semiconductor very-large scale integrated circuits. The SSPD significantly outperformed traditional single-photon counting avalanche diodes.
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Гершензон ЕМ, Гершензон МЕ, Гольцман ГН, Семенов АД, Сергеев АВ. Неселективное воздействие электромагнитного излучения на сверхпроводящую пленку в резистивном состоянии. Письма в ЖЭТФ. 1982;36(7):241–4.
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Гершензон ЕМ. Воздействие электромагнитного излучения на сверхпроводящую плёнку ниобия в резистивном состоянии. In: Тезисы докладов 22 Всесоюзной конференции по физике низких температур.; 1982. p. 79–80.
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Gershenzon EM, Gol'tsman GN, Elantiev AI, Karasik BS, Potoskuev SE. Intense electromagnetic radiation heating of electrons of a superconductor in the resistive state. Sov J Low Temp Phys. 1988;14(7):414–20.
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Gershenzon EM, Goltsman GN, Semenov AD, Sergeev AV. Limiting characteristic of fast superconducting bolometers. Sov Phys-Tech Phys. 1989;34:195–9.
Abstract: Теоретически и экспериментально исследовано физическое ограничение быстродействия сверхпроводящего болометра. Показано, что минимальная постоянная времени реализуется в условиях электронного разогрева и определяется процессом неупругого электрон-фонон- ного взаимодействия. Сформулированы требования кконструкции «электронного болометра» для достижения предельной чувствительности. Проведено сравнение характеристик электронного болометра и обычных болометров различных типов.
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Гершензон ЕМ, Гершензон МЕ, Гольцман ГН, Люлькин АМ, Семенов АД, Сергеев АВ. О предельных характеристиках быстродействующих серхпроводниковых болометров. Журнал технической физики. 1989;59(2):111–20.
Abstract: Теоретически и экспериментально исследовано физическое ограничение быстродействия сверхпроводящего болометра. Показано, что минимальная постоянная времени реализуется в условиях электронного разогрева и определяется процессом неупругого электрон-фонон- ного взаимодействия. Сформулированы требования кконструкции «электронного болометра» для достижения предельной чувствительности. Проведено сравнение характеристик электронного болометра и обычных болометров различных типов.
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Gershenzon EM, Gershenzon ME, Goltsman GN, Semenov AD, Sergeev AV. Wide-band highspeed Nb and YBaCuO detectors. IEEE Trans Magn. 1991;27(2):2836–9.
Abstract: The physical limitations on the response time and the nature of nonequilibrium detection of radiation were investigated for Nb and YBCO film in a wide spectral range from millimeter to near-infrared wavelengths. In the case of ideal heat removal from the film, the detection mechanism is connected with an electron heating effect which is not selective over a wide spectral interval. For Nb, the dependence of the response time on the electron mean free path l and temperature T is tau varies as T/sup -2/l/sup -1/. The values of detectivity D* and tau are 3*10/sup 11/ W/sup -1/ Hz/sup 1/2/ cm and 5*10/sup -9/ s at T=1.6 K, respectively. For YBCO film the tau value of 1-2 ps at T=77 K was obtained; the NEP value of 3*10/sup -11/ W-Hz/sup -1/2/ can be obtained at T=77 K in the case of the optimal film matching to the radiation.
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Gershenzon EM, Gol'tsman GN, Gogidze IG, Gusev YP, Elantiev AI, Karasik BS, et al. Millimeter and submillimeter wave range mixer based on electronic heating of superconducting films in the resistive state. Sov Supercond. 1990;3(10):1582–97.
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