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Korneev AA. Superconducting NbN microstrip single-photon detectors [abstract]. In: Prochazka I, Štefaňák M, Sobolewski R, Gábris A, editors. Proc. Quantum Optics and Photon Counting. Vol 11771. SPIE; 2021.
Abstract: Superconducting Single-Photon Detectors (SSPD) invented two decades ago have evolved to a mature technology and have become devices of choice in the advanced applications of quantum optics, such as quantum cryptography and optical quantum computing. In these applications SSPDs are coupled to single-mode fibers and feature almost unity detection efficiency, negligible dark counts, picosecond timing jitter and MHz photon count rate. Meanwhile, there are great many applications requiring coupling to multi-mode fibers or free space. ‘Classical’ SSPDs with 100-nm-wide superconducting strip and covering area of about 100 µm2 are not suitable for further scaling due to degradation of performance and low fabrication yield. Recently we have demonstrated single-photon counting in micron-wide superconducting bridges and strips. Here we present our approach to the realization of practical photon-counting detectors of large enough area to be efficiently coupled to multi-mode fibers or free space. The detector is either a meander or a spiral of 1-µm-wide strip covering an area of 50x50 µm2. Being operated at 1.7K temperature it demonstrates the saturated detection efficiency (i.e. limited by the absorption in the detector) up to 1550 nm wavelength, about 10 ns dead time and timing jitter in range 50-100 ps.
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Sáysz W, Guziewicz M, Bar J, Wegrzecki M, Grabiec P, Grodecki R, et al. Superconducting NbN nanostructures for single photon quantum detectors [abstract]. In: Proc. 7-th Int. Conf. Ion Implantation and Other Applications of Ions and Electrons.; 2008. 160.
Abstract: Practical quantum systems such as quantum communication (QC) or quantum measurement systems require detectors with high speed, high sensitivity, high quantum efficiency (QE), and short deadtimes along with precise timing characteristics and low dark counts. Superconducting single photon detectors (SSPDs) based on ultrathin meander type NbN nanostripes (operated at T=2-5K) are a new and highly promising type of devices fulfilling above requirements. In this paper we present results of the SSPDs nanostructure technological optimization. The base for our detector is thin-film (4nm) NbN layer deposited on 350- P m-thick sapphire substrate The active element of the detector is a meander- nanostructure made of 4-nm-thick and 100-nm-wide NbN stripe, covering 10 u 10 P m 2 area with the filling factor ~0,5. The NbN superconducting films were deposited on sapphire substrates by DC reactive magnetron sputtering whereas the meander element of the detector was patterned by the direct electron-beam lithography followed by reactive-ion etching. To enhance the SSPD efficiency at Ȝ = 1.55 P m, we have performed an approach to increase the absorption of the detector by integrating it with optical resonant cavity. An optical microcavity optimized for absorption of 1.55 P m photons was designed as an one-mirror resonator consisting of a Ȝ/4 dielectric layer and a metallic mirror. The microcavity was deposited on the top of the NbN SSPD meander. The resonator was formed by the dielectric SiO 2 layer and metal mirror made of gold or palladium. Microcavity layers were deposited using a magnetron sputtering system.
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Manova NN, Korneeva YP, Korneev AA, Slysz W, Voronov BM, Gol'tsman GN. Superconducting NbN single-photon detector integrated with quarter-wave resonator. Tech Phys Lett. 2011;37(5):469–71.
Abstract: The spectral dependence of the quantum efficiency of superconducting NbN single-photon detectors integrated with quarter-wave resonators based on Si3N4, SiO2, and SiO layers has been studied.
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Verevkin A, Xu Y, Zheng X, Williams C, Sobolewski R, Okunev O, et al. Superconducting NbN-based ultrafast hot-electron single-photon detector for infrared range. In: Proc. 12th Int. Symp. Space Terahertz Technol.; 2001. p. 462–8.
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Korneev A, Divochiy A, Tarkhov M, Minaeva O, Seleznev V, Kaurova N, et al. Superconducting NbN-nanowire single-photon detectors capable of photon number resolving. In: Supercond. News Forum.; 2008.
Abstract: We present our latest generation of ultra-fast superconducting NbN single-photon detectors (SSPD) capable of photon-number resolving (PNR). The novel SSPDs combine 10 μm x 10 μm active area with low kinetic inductance and PNR capability. That resulted in significantly reduced photoresponse pulse duration, allowing for GHz counting rates. The detector’s response magnitude is directly proportional to the number of incident photons, which makes this feature easy to use. We present experimental data on the performance of the PNR SSPDs. These detectors are perfectly suited for fibreless free-space telecommunications, as well as for ultra-fast quantum cryptography and quantum computing.
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Sobolewski R, Verevkin A, Gol’tsman GN. Superconducting optical single-photon detectors. In: CLEO/QELS. Optical Society of America; 2004. IThD1.
Abstract: We review the development of superconducting single-photon detectors. The devices are characterized by experimental quantum efficiency of ~8% for infrared photons, counting rate ~2 GHz, 18 ps jitter, and <0.01 per second dark counts.
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Marsili F, Bitauld D, Fiore A, Gaggero A, Leoni R, Mattioli F, et al. Superconducting parallel nanowire detector with photon number resolving functionality. J Modern Opt. 2009;56(2-3):334–44.
Abstract: We present a new photon number resolving detector (PNR), the Parallel Nanowire Detector (PND), which uses spatial multiplexing on a subwavelength scale to provide a single electrical output proportional to the photon number. The basic structure of the PND is the parallel connection of several NbN superconducting nanowires (100 nm-wide, few nm-thick), folded in a meander pattern. Electrical and optical equivalents of the device were developed in order to gain insight on its working principle. PNDs were fabricated on 3-4 nm thick NbN films grown on sapphire (substrate temperature TS=900C) or MgO (TS=400C) substrates by reactive magnetron sputtering in an Ar/N2 gas mixture. The device performance was characterized in terms of speed and sensitivity. The photoresponse shows a full width at half maximum (FWHM) as low as 660ps. PNDs showed counting performance at 80 MHz repetition rate. Building the histograms of the photoresponse peak, no multiplication noise buildup is observable and a one photon quantum efficiency can be estimated to be QE=3% (at 700 nm wavelength and 4.2 K temperature). The PND significantly outperforms existing PNR detectors in terms of simplicity, sensitivity, speed, and multiplication noise.
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Manova NN, Smirnov EO, Korneeva YP, Korneev AA, Goltsman GN. Superconducting photon counter for nanophotonics applications. In: J. Phys.: Conf. Ser. Vol 1410.; 2019. 012147 (1 to 5).
Abstract: We develop large area superconducting single-photon detector SSPD with a micron-wide strip suitable for free-space coupling or packaging with multi-mode optical fibres. The detector sensitive area is 20 μm in diameter. In near infrared (1330 nm wavelength) our SSPD exhibits above 30% detection efficiency with low dark counts and 45 ps timing jitter.
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Korneev A, Divochiy A, Marsili F, Bitauld D, Fiore A, Seleznev V, et al. Superconducting photon number resolving counter for near infrared applications. In: Tománek P, Senderáková D, Hrabovský M, editors. Proc. SPIE. Vol 7138. Spie; 2008. 713828 (1 to 5).
Abstract: We present a novel concept of photon number resolving detector based on 120-nm-wide superconducting stripes made of 4-nm-thick NbN film and connected in parallel (PNR-SSPD). The detector consisting of 5 strips demonstrate a capability to resolve up to 4 photons absorbed simultaneously with the single-photon quantum efficiency of 2.5% and negligibly low dark count rate.
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Semenov AD, Hübers H-W, Gol’tsman GN, Smirnov K. Superconducting quantum detector for astronomy and X-ray spectroscopy. In: Pekola J, Ruggiero B, Silvestrini P, editors. Proc. Int. Workshop on Supercond. Nano-Electronics Devices. : Springer; 2002. p. 201–10.
Abstract: We propose the novel concept of ultra-sensitive energy-dispersive superconducting quantum detectors prospective for applications in astronomy and X-ray spectroscopy. Depending on the superconducting material and operation conditions, such detector may allow realizing background limited noise equivalent power 10−21 W Hz−1/2 in the terahertz range when exposed to 4-K background radiation or counting of 6-keV photon with almost 10—4 energy resolution. Planar layout and relatively simple technology favor integration of elementary detectors into a detector array.
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