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Smirnov K, Korneev A, Minaeva O, Divochiy A, Tarkhov M, Ryabchun S, et al. Ultrathin NbN film superconducting single-photon detector array. In: J. Phys.: Conf. Ser. Vol 61.; 2007. p. 1081–5.
Abstract: We report on the fabrication process of the 2 × 2 superconducting single-photon detector (SSPD) array. The SSPD array is made from ultrathin NbN film and is operated at liquid helium temperatures. Each detector is a nanowire-based structure patterned by electron beam lithography process. The advances in fabrication technology allowed us to produce highly uniform strips and preserve superconducting properties of the unpatterned film. SSPD exhibit up to 30% quantum efficiency in near infrared and up to 1% at 5-μm wavelength. Due to 120 MHz counting rate and 18 ps jitter, the time-domain multiplexing read-out is proposed for large scale SSPD arrays. Single-pixel SSPD has already found a practical application in non-invasive testing of semiconductor very-large scale integrated circuits. The SSPD significantly outperformed traditional single-photon counting avalanche diodes.
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Seleznev VA, Divochiy AV, Vakhtomin YB, Morozov PV, Zolotov PI, Vasil'ev DD, et al. Superconducting detector of IR single-photons based on thin WSi films. In: J. Phys.: Conf. Ser. Vol 737.; 2016. 012032.
Abstract: We have developed the deposition technology of WSi thin films 4 to 9 nm thick with high temperature values of superconducting transition (Tc~4 K). Based on deposed films there were produced nanostructures with indicative planar sizes ~100 nm, and the research revealed that even on nanoscale the films possess of high critical temperature values of the superconducting transition (Tc~3.3-3.7 K) which certifies high quality and homogeneity of the films created. The first experiments on creating superconducting single-photon detectors showed that the detectors' SDE (system detection efficiency) with increasing bias current (I b) reaches a constant value of ~30% (for X=1.55 micron) defined by infrared radiation absorption by the superconducting structure. To enhance radiation absorption by the superconductor there were created detectors with cavity structures which demonstrated a practically constant value of quantum efficiency >65% for bias currents Ib>0.6-Ic. The minimal dark counts level (DC) made 1 s-1 limited with background noise. Hence WSi is the most promising material for creating single-photon detectors with record SDE/DC ratio and noise equivalent power (NEP).
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Zolotov PI, Divochiy AV, Vakhtomin YB, Morozov PV, Seleznev VA, Smirnov KV. Development of high-effective superconducting single-photon detectors aimed for mid-IR spectrum range. In: J. Phys.: Conf. Ser. Vol 917.; 2017. 062037.
Abstract: We report on development of superconducting single-photon detectors (SSPD) with high intrinsic quantum efficiency in the wavelength range 1.31 – 3.3 μm. By optimization of the NbN film thickness and its compound, we managed to improve detection efficiency of the detectors in the range up to 3.3 μm. Optimized devices showed intrinsic quantum efficiencies as high as 10% at mid-IR range.
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Korneev A, Divochiy A, Tarkhov M, Minaeva O, Seleznev V, Kaurova N, et al. New advanced generation of superconducting NbN-nanowire single-photon detectors capable of photon number resolving. In: J. Phys.: Conf. Ser. Vol 97.; 2008. 012307 (1 to 6).
Abstract: We present our latest generation of ultrafast superconducting NbN single-photon detectors (SSPD) capable of photon-number resolving (PNR). We have developed, fabricated and tested a multi-sectional design of NbN nanowire structures. The novel SSPD structures consist of several meander sections connected in parallel, each having a resistor connected in series. The novel SSPDs combine 10 μm × 10 μm active areas with a low kinetic inductance and PNR capability. That resulted in a significantly reduced photoresponse pulse duration, allowing for GHz counting rates. The detector's response magnitude is directly proportional to the number of incident photons, which makes this feature easy to use. We present experimental data on the performances of the PNR SSPDs. The PNR SSPDs are perfectly suited for fibreless free-space telecommunications, as well as for ultrafast quantum cryptography and quantum computing.
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Antipov AV, Seleznev VA, Vakhtomin YB, Morozov PV, Vasilev DD, Malevannaya EI, et al. Investigation of WSi and NbN superconducting single-photon detectors in mid-IR range. In: IOP Conf. Ser.: Mater. Sci. Eng. Vol 781.; 2020. 012011 (1 to 5).
Abstract: Spectral characteristics of WSi and NbN superconducting single-photon detectors with different surface resistance and width of nanowire strips have been investigated in the wavelength range of 1.3-2.5 μm. WSi structures with narrower strips demonstrated better performance for detection of single photons in longer wavelength range. The difference in normalized photon count rate for such structures reaches one order of magnitude higher in comparison with structures based on NbN thin films at 2.5 μm.
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Vasilev DD, Malevannaya EI, Moiseev KM, Zolotov PI, Antipov AV, Vakhtomin YB, et al. Influence of deposited material energy on superconducting properties of the WSi films. In: IOP Conf. Ser.: Mater. Sci. Eng. Vol 781.; 2020. 012013 (1 to 6).
Abstract: WSi thin films have the advantages for creating SNSPDs with a large active area or array of detectors on a single substrate due to the amorphous structure. The superconducting properties of ultrathin WSi films substantially depends on their structure and thickness as the NbN films. Scientific groups investigating WSi films mainly focused only on changes of their thickness and the ratio of the components on the substrate at room temperature. This paper presents experiments to determine the effect of the bias potential on the substrate, the temperature of the substrate, and the peak power of pulsed magnetron sputtering, which is the equivalent of ionization, a tungsten target, on the surface resistance and superconducting properties of the WSi ultrathin films. The negative effect of the substrate temperature and the positive effect of the bias potential and the ionization coefficient (peak current) allow one to choose the best WSi films formation mode for SNSPD: substrate temperature 297 K, bias potential -60 V, and peak current 3.5 A.
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Zolotov P, Divochiy A, Vakhtomin Y, Seleznev V, Morozov P, Smirnov K. Superconducting single-photon detectors made of ultra-thin VN films. In: KnE Energy. Vol 3.; 2018. p. 83–9.
Abstract: We optimized technology of thin VN films deposition in order to study VN-based superconducting single-photon detectors. Investigation of the main VN film parameters showed that this material has lower resistivity compared to commonly used NbN. Fabricated from obtained films devices showed 100% intrinsic detection efficiency at 900 nm, at the temperature of 1.7 K starting with the bias current of 0.7·I
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Baeva EM, Sidorova MV, Korneev AA, Smirnov KV, Divochy AV, Morozov PV, et al. Thermal properties of NbN single-photon detectors. Phys Rev Applied. 2018;10(6):064063 (1 to 8).
Abstract: We investigate thermal properties of a NbN single-photon detector capable of unit internal detection efficiency. Using an independent calibration of the coupling losses, we determine the absolute optical power absorbed by the NbN film and, via resistive superconductor thermometry, the temperature dependence of the thermal resistance Z(T) of the NbN film. In principle, this approach permits simultaneous measurement of the electron-phonon and phonon-escape contributions to the energy relaxation, which in our case is ambiguous because of the similar temperature dependencies. We analyze Z(T) with a two-temperature model and impose an upper bound on the ratio of electron and phonon heat capacities in NbN, which is surprisingly close to a recent theoretical lower bound for the same quantity in similar devices.
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Zhang X, Lita AE, Smirnov K, Liu HL, Zhu D, Verma VB, et al. Strong suppression of the resistivity near the superconducting transition in narrow microbridges in external magnetic fields. Phys Rev B. 2020;101(6):060508 (1 to 6).
Abstract: We have investigated a series of superconducting bridges based on homogeneous amorphous WSi and MoSi films, with bridge widths w ranging from 2 to 1000μm and film thicknesses d∼4−6 and 100 nm. Upon decreasing the bridge widths below the respective Pearl lengths, we observe in all cases distinct changes in the characteristics of the resistive transitions to superconductivity. For each of the films, the resistivity curves R(B,T) separate at a well-defined and field-dependent temperature T∗(B) with decreasing the temperature, resulting in a dramatic suppression of the resistivity and a sharpening of the transitions with decreasing bridge width w. The associated excess conductivity in all the bridges scales as 1/w, which may suggest either the presence of a highly conducting region that is dominating the electric transport, or a change in the vortex dynamics in narrow enough bridges. We argue that this effect can only be observed in materials with sufficiently weak vortex pinning.
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Semenov AD, Hübers H-W, Gol’tsman GN, Smirnov K. Superconducting quantum detector for astronomy and X-ray spectroscopy. In: Pekola J, Ruggiero B, Silvestrini P, editors. Proc. Int. Workshop on Supercond. Nano-Electronics Devices. : Springer; 2002. p. 201–10.
Abstract: We propose the novel concept of ultra-sensitive energy-dispersive superconducting quantum detectors prospective for applications in astronomy and X-ray spectroscopy. Depending on the superconducting material and operation conditions, such detector may allow realizing background limited noise equivalent power 10−21 W Hz−1/2 in the terahertz range when exposed to 4-K background radiation or counting of 6-keV photon with almost 10—4 energy resolution. Planar layout and relatively simple technology favor integration of elementary detectors into a detector array.
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