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Author
Manova, N. N.
;
Simonov, N. O.
;
Korneeva, Y. P.
;
Korneev, A. A.
Title
Developing of NbN films for superconducting microstrip single-photon detector
Type
Conference Article
Year
2020
Publication
J. Phys.: Conf. Ser.
Abbreviated Journal
J. Phys.: Conf. Ser.
Volume
1695
Issue
Pages
012116 (1 to 5)
Keywords
NbN SSPD, SNSPD, NbN films
Abstract
We optimized NbN films on a Si substrate with a buffer SiO2 layer to produce superconducting microstrip single-photon detectors with saturated dependence of quantum efficiency (QE) versus normalized bias current. We varied thickness of films and observed the maximum QE saturation for device based on the thinner film with the lowest ratio RS300/RS20.
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1742-6588
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no
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1786
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