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Abstract: We report on some unusual features observed during fabrication of ultrathin NbN films with high Tc. The films were used to fabricate HEB mixers, which were evaluated for IF bandwidth measurements at 140 GHz. Ultrathin films were fabricated using reactive dc magnetron sputtering with a discharge current source. Reproducible parameters of the films are assured keeping constant the difference between the discharge voltage in pure argon, and in a gas mixture, for the same current. A maximum bandwidth of 4 GHz at optimal LO and dc bias was obtained for mixer chip based on NbN film 35 A thick with Tc = 11 K.

Keywords: NbN HEB mixers, fabrication process

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	Merkel H, Khosropanah P, Yagubov P, Kollberg E. A hot spot mixer model for superconducting phonone–cooled HEB far above the quasipartical band gap. In: Proc. 10^th Int. Symp. Space Terahertz Technol. Charlottesville, Virginia; 1999. p. 592–606. Permanent link \| Save citation: RTF PDF LaTeX \| Export record: BibTeX Endnote ISI RIS Atom XML MODS XML ODF XML Word XML
	Yagubov P, Gol'tsman G, Voronov B, Seidman L, Siomash V, Cherednichenko S, et al. The bandwidth of HEB mixers employing ultrathin NbN films on sapphire substrate. In: Proc. 7^th Int. Symp. Space Terahertz Technol. Charlottesville, Virginia, USA; 1996. p. 290–302. Abstract: We report on some unusual features observed during fabrication of ultrathin NbN films with high Tc. The films were used to fabricate HEB mixers, which were evaluated for IF bandwidth measurements at 140 GHz. Ultrathin films were fabricated using reactive dc magnetron sputtering with a discharge current source. Reproducible parameters of the films are assured keeping constant the difference between the discharge voltage in pure argon, and in a gas mixture, for the same current. A maximum bandwidth of 4 GHz at optimal LO and dc bias was obtained for mixer chip based on NbN film 35 A thick with Tc = 11 K. Keywords: NbN HEB mixers, fabrication process Permanent link \| Save citation: RTF PDF LaTeX \| Export record: BibTeX Endnote ISI RIS Atom XML MODS XML ODF XML Word XML