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Finkel M, Thierschmann H, Galatro L, Katan AJ, Thoen DJ, de Visser PJ, et al. Performance of THz components based on microstrip PECVD SiNx technology. IEEE Trans THz Sci Technol. 2017;7(6):765–71.
Abstract: We present a performance analysis of passive THz components based on Microstrip transmission lines with a 2-μmthin plasma-enhanced chemical vapor deposition grown silicon nitride (PECVD SiNX) dielectric layer. A set of thru-reflect-line calibration structures is used for basic transmission line characterizations. We obtain losses of 9 dB/mm at 300 GHz. Branchline hybrid couplers are realized that exhibit 2.5-dB insertion loss, 1-dB amplitude imbalance, and -26-dB isolation, in agreement with simulations. We use the measured center frequency to determine the dielectric constant of the PECVD SiN x , which yields 5.9. We estimate the wafer-to-wafer variations to be of the order of 1%. Directional couplers are presented which exhibit -12-dB transmission to the coupled port and -26 dB to the isolated port. For transmission lines with 5-μm-thin silicon nitride (SiN x ), we observe losses below 4 dB/mm. The thin SiN x dielectric membrane makes the THz components compatible with scanning probe microscopy cantilevers allowing the application of this technology in on-chip circuits of a THz near-field microscope.
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Floet DW, Baselmans JJA, Klapwijk TM, Gao JR. Resistive transition of niobium superconducting hot-electron bolometer mixers. Appl Phys Lett. 1998;73(19):2826.
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Ganzevles WFM, Gao JR, de Korte PAJ, Klapwijk TM. Direct response of microstrip line coupled Nb THz hot-electron bolometer mixers. Appl Phys Lett. 2001;79(15):2483–5.
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Gao GR, Hovenier JN, Yang ZQ, Baselmans JJA, Baryshev A, Hajenius M, et al. A novel terahertz heterodyne receiver based on a quantum cascade laser and a superconducting bolometer. In: Proc. 16th Int. Symp. Space Terahertz Technol. Göteborg, Sweden; 2005. p. 19–23.
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Gao JR, Hovenier JN, Yang ZQ, Baselmans JJA, Baryshev A, Hajenius M, et al. Terahertz heterodyne receiver based on a quantum cascade laser and a superconducting bolometer. Appl. Phys. Lett.. 2005;(86).
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