Elmanov, I.; Elmanova, A.; Komrakova, S.; Golikov, A.; Kaurova, N.; Kovalyuk, V.; Goltsman, G.; Arakelyan, S.; Evlyukhin, A.; Kalachev, A.; Naumov, A. |
Method for determination of resists parameters for photonic – integrated circuits e-beam lithography on silicon nitride platform |
2019 |
EPJ Web Conf. |
10.1051/epjconf/201922003012 |
Zubkova, E.; Golikov, A.; An, P.; Kovalyuk, V.; Korneev, A.; Ferrari, S.; Pernice, W.; Goltsman, G. |
CWDM demultiplexer using anti-reflection, contra-directional couplers based on silicon nitride rib waveguide |
2019 |
J. Phys.: Conf. Ser. |
10.1088/1742-6596/1410/1/012179 |