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Author (up) Li, T. F.; Pashkin, Yu. A.; Astafiev, O.; Nakamura, Y.; Tsai, J. S.; Im, H.
Title High-frequency metallic nanomechanical resonators Type Journal Article
Year 2008 Publication Appl. Phys. Lett. Abbreviated Journal Appl. Phys. Lett.
Volume 92 Issue Pages 043112(1)-043112(3)
Keywords nanomechanical resonator, polycrystalline metal films
Abstract We developed a technology to fabricate fully metallic doubly clamped beams working as nanomechanical resonators. Measured with a magnetomotive detection scheme, the beams, made of polycrystalline metal films, show as good quality as previously reported ones made of single crystal materials, such as Si, GaAs, AlN, and SiC. Our method is compatible with the conventional fabrication process for nanoscale electronic circuits and thus offers a possibility of easily integrating the beams into superconducting charge and flux qubits and single-electron transistors as well as coupling them to coplanar waveguide resonators.
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Call Number Serial 621
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