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Author Delacour, C.; Claudon, J.; Poizat, J.-Ph.; Pannetier, B.; Bouchiat, V.; de Lamaestre, R. Espiau; Villegier, J.-C.; Tarkhov, M.; Korneev, A.; Voronov, B.; Gol'tsman, G.
Title Superconducting single photon detectors made by local oxidation with an atomic force microscope Type Journal Article
Year 2007 Publication Appl. Phys. Lett. Abbreviated Journal Appl. Phys. Lett.
Volume 90 Issue 19 Pages 191116 (1 t0 3)
Keywords SSPD
Abstract The authors present a fabrication technique of superconducting single photon detectors made by local oxidation of niobium nitride ultrathin films. Narrow superconducting meander lines are obtained by direct writing of insulating niobium oxynitride lines through the films using voltage-biased tip of an atomic force microscope. Due to the 30nm resolution of the lithographic technique, the filling factor of the meander line can be made substantially higher than detector of similar geometry made by electron beam lithography, thus leading to increased quantum efficiency. Single photon detection regime of these devices is demonstrated at 4.2K.

The authors thank J.-P. Maneval for stimulating discussions. This work has been partly supported by ACI Nanoscience from French Ministry of Research, D.G.A., by Grant No. 02.445.11.7434 of Russian Ministry of Education and Science, and by the European Commission under project “SINPHONIA,” Contract No. NMP4-CT-2005-16433.
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ISSN 0003-6951 ISBN (up) Medium
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Call Number Serial 423
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Title Проект Радиоастрон Type
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Language russian Summary Language Original Title
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Call Number RPLAB @ s @ RADIOASTRON_site_rus Serial 393
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Author
Title Проект Миллиметрон Type
Year 2007 Publication Abbreviated Journal
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Language russian Summary Language Original Title
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Call Number RPLAB @ s @ MILLIMETRON_site_rus Serial 395
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Author Pilbratt, Goran L.
Title Herschel mission: status and observing opportunities Type
Year 2006 Publication Abbreviated Journal
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Call Number RPLAB @ s @ HERSCHEL_proj Serial 397
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Author Kardashev, N. S.; Andreyanov, V. V.; Gromov, V. D.; Buyakas, V. I.; Gvamichava, A. S.; Kotik, A. N.; Kurt, V. G.; Lazareva, G. S.; Mironova, E. N.; Myshonkova, N. V.; Slysh, V. I.; Trubnikov, A. G.; Vinogradov, I. S.; Troitsky, V. F.; Puryaev, D. T.; Usyukin, V. I.
Title The Millimetron project Type Conference Article
Year 2007 Publication Radioastronomical Tools and Techniques Abbreviated Journal
Volume Issue Pages 111
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Publisher Place of Publication Editor Kardashev, N. S.; Dagkesamanskii, S. A.
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Call Number RPLAB @ s @ MILLIMETRON_Krdashev_2007 Serial 398
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