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Delacour, C., Claudon, J., Poizat, J. - P., Pannetier, B., Bouchiat, V., de Lamaestre, R. E., et al. (2007). Superconducting single photon detectors made by local oxidation with an atomic force microscope. Appl. Phys. Lett., 90(19), 191116 (1 t0 3).
Abstract: The authors present a fabrication technique of superconducting single photon detectors made by local oxidation of niobium nitride ultrathin films. Narrow superconducting meander lines are obtained by direct writing of insulating niobium oxynitride lines through the films using voltage-biased tip of an atomic force microscope. Due to the 30nm resolution of the lithographic technique, the filling factor of the meander line can be made substantially higher than detector of similar geometry made by electron beam lithography, thus leading to increased quantum efficiency. Single photon detection regime of these devices is demonstrated at 4.2K.
The authors thank J.-P. Maneval for stimulating discussions. This work has been partly supported by ACI Nanoscience from French Ministry of Research, D.G.A., by Grant No. 02.445.11.7434 of Russian Ministry of Education and Science, and by the European Commission under project “SINPHONIA,” Contract No. NMP4-CT-2005-16433.
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Prober, D. E. (1993). Superconducting terahertz mixer using a transition-edge microbolometer. Appl. Phys. Lett., 62(17), 2119–2121.
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Lindgren, M., Zorin, M. A., Trifonov, V., Danerud, M., Winkler, D., Karasik, B. S., et al. (1994). Optical mixing in a patterned YBa2Cu3O7-δ thin film. Appl. Phys. Lett., 65(26), 3398–3400.
Abstract: Mixing of 1.56 µm infrared radiation from two lasers in a high quality YBa2Cu3O7-δ thin film, patterned to parallel strips, was demonstrated. A mixer bandwidth of 18 GHz, limited by the measurement system, was obtained. A model based on nonequilibrium electron heating gives a good fit to the data and predicts an intrinsic mixer bandwidth in excess of 100 GHz, operating in the whole infrared spectrum. Reduction of bolometric effects and ways to decrease the conversion loss of the mixer is discussed. The minimum conversion loss is expected to be ~10 dB.
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Karasik, B. S., & Elantiev, A. I. (1996). Noise temperature limit of a superconducting hot-electron bolometer mixer. Appl. Phys. Lett., 68(6), 853–855.
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Karasik, B. S., Il'in, K. S., Pechen, E. V., & Krasnosvobodtsev, S. I. (1996). Diffusion cooling mechanism in a hot-electron NbC microbolometer mixer. Appl. Phys. Lett., 68(16), 2285–2287.
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