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Smirnov, A. V., Larionov, P. A., Finkel, M. I., Maslennikov, S. N., Voronov, B. M., & Gol'tsman, G. N. (2008). NbZr films for THz phonon-cooled HEB mixers. In Proc. 19th Int. Symp. Space Terahertz Technol. (pp. 44–47). Groningen, Netherlands.
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Kaurova, N. S., Finkel, M. I., Maslennikov, S. N., Vahtomin, Y. B., Antipov, S. V., Smirnov, K. V., et al. (2004). Submillimeter mixer based on YBa2Cu3O7-x thin film. In Proc. 1-st conf. Fundamental problems of high temperature superconductivity (291). Moscow-Zvenigorod.
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Ryabchun, S. A., Tretyakov, I. V., Finkel, M. I., Maslennikov, S. N., Kaurova, N. S., Seleznev, V. A., et al. (2009). NbN phonon-cooled hot-electron bolometer mixer with additional diffusion cooling. In Proc. 20th Int. Symp. Space Terahertz Technol. (pp. 151–154). Charlottesville, USA.
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Antipov, S. V., Svechnikov, S. I., Smirnov, K. V., Vakhtomin, Y. B., Finkel, M. I., Goltsman, G. N., et al. (2001). Noise temperature of quasioptical NbN hot electron bolometer mixers at 900 GHz. Physics of Vibrations, 9(4), 242–245.
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Finkel, M., Thierschmann, H. R., Galatro, L., Katan, A. J., Thoen, D. J., de Visser, P. J., et al. (2016). Branchline and directional THz coupler based on PECVD SiNx-technology. In 41st IRMMW-THz.
Abstract: A fabrication technology to realize THz microstrip lines and passive circuit components is developed and tested making use of a plasma-enhanced chemical vapor deposition grown silicon nitride (PECVD SiNx) dielectric membrane. We use 2 μm thick SiNx and 300 nm thick gold layers on sapphire substrates. We fabricate a set of structures for thru-reflect-line (TRL) calibration, with the reflection standard implemented as a short through the via. We find losses of 9.5 dB/mm at 300 GHz for a 50 Ohm line. For a branchline coupler we measure 2.5 dB insertion loss, 1 dB amplitude imbalance and 21 dB isolation. Good control over the THz lines parameters is proven by similar performance of a set of 5 structures. The directional couplers show -14 dB transmission to the coupled port, -24 dB to the isolated port and -25 dB in reflection. The SiNx membrane, used as a dielectric, is compatible with atomic force microscopy (AFM) cantilevers allowing the application of this technology to the development of a THz near-field microscope.
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