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Finkel, M., Thierschmann, H., Galatro, L., Katan, A. J., Thoen, D. J., de Visser, P. J., et al. (2017). Performance of THz components based on microstrip PECVD SiNx technology. IEEE Trans. THz Sci. Technol., 7(6), 765–771.
Abstract: We present a performance analysis of passive THz components based on Microstrip transmission lines with a 2-μmthin plasma-enhanced chemical vapor deposition grown silicon nitride (PECVD SiNX) dielectric layer. A set of thru-reflect-line calibration structures is used for basic transmission line characterizations. We obtain losses of 9 dB/mm at 300 GHz. Branchline hybrid couplers are realized that exhibit 2.5-dB insertion loss, 1-dB amplitude imbalance, and -26-dB isolation, in agreement with simulations. We use the measured center frequency to determine the dielectric constant of the PECVD SiN x , which yields 5.9. We estimate the wafer-to-wafer variations to be of the order of 1%. Directional couplers are presented which exhibit -12-dB transmission to the coupled port and -26 dB to the isolated port. For transmission lines with 5-μm-thin silicon nitride (SiN x ), we observe losses below 4 dB/mm. The thin SiN x dielectric membrane makes the THz components compatible with scanning probe microscopy cantilevers allowing the application of this technology in on-chip circuits of a THz near-field microscope.
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Floet, D. W., Baselmans, J. J. A., Klapwijk, T. M., & Gao, J. R. (1998). Resistive transition of niobium superconducting hot-electron bolometer mixers. Appl. Phys. Lett., 73(19), 2826.
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Ganzevles, W. F. M., Gao, J. R., de Korte, P. A. J., & Klapwijk, T. M. (2001). Direct response of microstrip line coupled Nb THz hot-electron bolometer mixers. Appl. Phys. Lett., 79(15), 2483–2485.
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Gao, G. R., Hovenier, J. N., Yang, Z. Q., Baselmans, J. J. A., Baryshev, A., Hajenius, M., et al. (2005). A novel terahertz heterodyne receiver based on a quantum cascade laser and a superconducting bolometer. In Proc. 16th Int. Symp. Space Terahertz Technol. (pp. 19–23). Göteborg, Sweden.
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Gao, J. R., Hovenier, J. N., Yang, Z. Q., Baselmans, J. J. A., Baryshev, A., Hajenius, M., et al. (2005). Terahertz heterodyne receiver based on a quantum cascade laser and a superconducting bolometer. Appl. Phys. Lett., (86).
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