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Delacour, C.; Claudon, J.; Poizat, J.-Ph.; Pannetier, B.; Bouchiat, V.; de Lamaestre, R. Espiau; Villegier, J.-C.; Tarkhov, M.; Korneev, A.; Voronov, B.; Gol'tsman, G. Superconducting single photon detectors made by local oxidation with an atomic force microscope 2007 Appl. Phys. Lett. 90 191116 (1 t0 3) details   doi
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