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Title
Year
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Edlmayr, V.
;
Harzer, T. P.
;
Hoffmann, R.
;
Kiener, D.
;
Scheu, C.
;
Mitterer, C.
Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings
2011
J. Vac. Sci. Technol. A
29
8
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