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Zolotov, P. I.; Divochiy, A. V.; Vakhtomin, Y. B.; Lubenchenko, A. V.; Morozov, P. V.; Shurkaeva, I. V.; Smirnov, K. V. Influence of sputtering parameters on the main characteristics of ultra-thin vanadium nitride films 2018 J. Phys.: Conf. Ser. 1124 051030 details   doi
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