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\bibitem{Titova_etal2020} Titova NA, Baeva EM, Kardakova AI, Goltsman GN. Fabrication of NbN/SiN$_{x}$:H/SiO$_{2}$ membrane structures for study of heat conduction at low temperatures. In: J. Phys.: Conf. Ser. Vol 1695.; 2020. 012190.

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