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\bibitem{Beebe_etal2016} Beebe MR, Beringer DB, Burton MC, Yang K, Lukaszew RA. Stoichiometry and thickness dependence of superconducting properties of niobium nitride thin films. Journal of Vacuum Science \& Technology A: Vacuum, Surfaces, and Films. 2016;34(2):021510 (1 to 4).

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