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\bibitem{Beebe_etal2016} Beebe, M. R., Beringer, D. B., Burton, M. C., Yang, K., \& Lukaszew, R. A. (2016). Stoichiometry and thickness dependence of superconducting properties of niobium nitride thin films. \textit{Journal of Vacuum Science \& Technology A: Vacuum, Surfaces, and Films}, \textit{34}(2), 021510 (1 to 4).

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