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Elmanov, I.; Elmanova, A.; Komrakova, S.; Golikov, A.; Kaurova, N.; Kovalyuk, V.; Goltsman, G.; Arakelyan, S.; Evlyukhin, A.; Kalachev, A.; Naumov, A. Method for determination of resists parameters for photonic – integrated circuits e-beam lithography on silicon nitride platform 2019 EPJ Web Conf. 220 03012 details   doi
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