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Prokhodtsov, A.; Golikov, A.; An, P.; Kovalyuk, V.; Goltsman, G.; Arakelyan, S.; Evlyukhin, A.; Kalachev, A.; Naumov, A. Effect of silicon oxide coating on a silicon nitride focusing grating coupler efficiency 2019 EPJ Web Conf. 220 02009 details   doi
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