PT Journal AU Korneeva, YP Mikhailov, MY Pershin, YP Manova, NN Divochiy, AV Vakhtomin, YB Korneev, AA Smirnov, KV Sivakov, AG Devizenko, AY Goltsman, GN TI Superconducting single-photon detector made of MoSi film SO Supercond. Sci. Technol. JI Supercond. Sci. Technol. PY 2014 BP 095012 VL 27 IS 9 DI 10.1088/0953-2048/27/9/095012 DE SSPD; SNSPD AB We fabricated and characterized nanowire superconducting single-photon detectors made of 4 nm thick amorphous Mox Si1−x films. At 1.7 K the best devices exhibit a detection efficiency (DE) up to 18% at 1.2 $\mu {\rm m}$ wavelength of unpolarized light, a characteristic response time of about 6 ns and timing jitter of 120 ps. The DE was studied in wavelength range from 650 nm to 2500 nm. At wavelengths below 1200 nm these detectors reach their maximum DE limited by photon absorption in the thin MoSi film. ER