%0 Conference Proceedings %T Waveguide integrated superconducting single-photon detector for on-chip quantum and spectral photonic application %A Kovalyuk, V. %A Ferrari, S. %A Kahl, O. %A Semenov, A. %A Lobanov, Y. %A Shcherbatenko, M. %A Korneev, A. %A Pernice, W. %A Goltsman, G. %S J. Phys.: Conf. Ser. %D 2017 %V 917 %F Kovalyuk_etal2017 %O exported from refbase (https://db.rplab.ru/refbase/show.php?record=1140), last updated on Sat, 01 May 2021 22:51:02 -0500 %X With use of the travelling-wave geometry approach, integrated superconductor- nanophotonic devices based on silicon nitride nanophotonic waveguide with a superconducting NbN-nanowire suited on top of the waveguide were fabricated. NbN-nanowire was operated as a single-photon counting detector with up to 92 % on-chip detection efficiency in the coherent mode, serving as a highly sensitive IR heterodyne mixer with spectral resolution (f/df) greater than 106 in C-band at 1550 nm wavelength %K SSPD %K SNSPD %K waveguide %R doi :10.1088/1742-6596/917/6/062032 %U https://doi.org/doi :10.1088/1742-6596/917/6/062032 %P 062032