PT Unknown AU Kovalyuk, V Ferrari, S Kahl, O Semenov, A Lobanov, Y Shcherbatenko, M Korneev, A Pernice, W Goltsman, G TI Waveguide integrated superconducting single-photon detector for on-chip quantum and spectral photonic application SE J. Phys.: Conf. Ser. PY 2017 BP 062032 VL 917 DI doi :10.1088/1742-6596/917/6/062032 DE SSPD; SNSPD; waveguide AB With use of the travelling-wave geometry approach, integrated superconductor- nanophotonic devices based on silicon nitride nanophotonic waveguide with a superconducting NbN-nanowire suited on top of the waveguide were fabricated. NbN-nanowire was operated as a single-photon counting detector with up to 92 % on-chip detection efficiency in the coherent mode, serving as a highly sensitive IR heterodyne mixer with spectral resolution (f/df) greater than 106 in C-band at 1550 nm wavelength ER