%0 Journal Article %T Superconductivity behavior in epitaxial TiN films points to surface magnetic disorder %A Saveskul, N. A. %A Titova, N. A. %A Baeva, E. M. %A Semenov, A. V. %A Lubenchenko, A. V. %A Saha, S. %A Reddy, H. %A Bogdanov, S. I. %A Marinero, E. E. %A Shalaev, V. M. %A Boltasseva, A. %A Khrapai, V. S. %A Kardakova, A. I. %A Goltsman, G. N. %J Phys. Rev. Applied %D 2019 %V 12 %N 5 %@ 2331-7019 %F Saveskul_etal2019 %O exported from refbase (https://db.rplab.ru/refbase/show.php?record=1166), last updated on Fri, 30 Apr 2021 22:21:18 -0500 %X We analyze the evolution of the normal and superconducting properties of epitaxial TiN films, characterized by high Ioffe-Regel parameter values, as a function of the film thickness. As the film thickness decreases, we observe an increase of the residual resistivity, that becomes dominated by diffusive surface scattering for d≤20nm. At the same time, a substantial thickness-dependent reduction of the superconducting critical temperature is observed compared to the bulk TiN value. In such high-quality material films, this effect can be explained by a weak magnetic disorder residing in the surface layer with a characteristic magnetic defect density of approximately 1012cm−2. Our results suggest that surface magnetic disorder is generally present in oxidized TiN films. %K epitaxial TiN films %R 10.1103/PhysRevApplied.12.054001 %U https://link.aps.org/doi/10.1103/PhysRevApplied.12.054001 %U https://doi.org/10.1103/PhysRevApplied.12.054001 %P 054001