PT Journal AU Saveskul, NA Titova, NA Baeva, EM Semenov, AV Lubenchenko, AV Saha, S Reddy, H Bogdanov, SI Marinero, EE Shalaev, VM Boltasseva, A Khrapai, VS Kardakova, AI Goltsman, GN TI Superconductivity behavior in epitaxial TiN films points to surface magnetic disorder SO Phys. Rev. Applied JI Phys. Rev. Applied PY 2019 BP 054001 VL 12 IS 5 DI 10.1103/PhysRevApplied.12.054001 DE epitaxial TiN films AB We analyze the evolution of the normal and superconducting properties of epitaxial TiN films, characterized by high Ioffe-Regel parameter values, as a function of the film thickness. As the film thickness decreases, we observe an increase of the residual resistivity, that becomes dominated by diffusive surface scattering for d≤20nm. At the same time, a substantial thickness-dependent reduction of the superconducting critical temperature is observed compared to the bulk TiN value. In such high-quality material films, this effect can be explained by a weak magnetic disorder residing in the surface layer with a characteristic magnetic defect density of approximately 1012cm−2. Our results suggest that surface magnetic disorder is generally present in oxidized TiN films. ER