%0 Conference Proceedings
%T Study of silicon nitride O-ring resonator for gas-sensing applications
%A Elmanova, A.
%A An, P.
%A Kovalyuk, V.
%A Golikov, A.
%A Elmanov, I.
%A Goltsman, G.
%S J. Phys.: Conf. Ser.
%D 2020
%V 1695
%@ 1742-6588
%F Elmanova_etal2020
%O exported from refbase (https://db.rplab.ru/refbase/show.php?record=1176), last updated on Sat, 01 May 2021 14:17:20 -0500
%X In this work, we experimentally studied the influence of different gaseous surroundings on silicon nitride O-ring resonator transmission. We compared the obtained results with numerical calculations and theoretical analysis and found a good agreement between them. Our results have a great potential for gas sensing applications, where a compact footprint and high efficiency are desired simultaneously.
%K silicon  nitride  O-ring  resonator
%K ORR
%R 10.1088/1742-6596/1695/1/012124
%U https://iopscience.iop.org/article/10.1088/1742-6596/1695/1/012124
%U https://doi.org/10.1088/1742-6596/1695/1/012124
%P 012124