PT Unknown
AU Prokhodtsov, A
   Golikov, A
   An, P
   Kovalyuk, V
   Goltsman, G
   Arakelyan, S
   Evlyukhin, A
   Kalachev, A
   Naumov, A
TI Effect of silicon oxide coating on a silicon nitride focusing grating coupler efficiency
SE EPJ Web Conf.
PY 2019
BP 02009
VL 220
DI 10.1051/epjconf/201922002009
DE grating coupler; SiO2
AB The dependence of the efficiency of the focusing grating couplers on the period and filling factor before and after deposition of the upper silicon oxide layer was experimentally studied. The obtained data are of practical importance for tunable integrated-optical devices based on silicon nitride platform.
ER