TY  - CONF
AU  - Prokhodtsov, A.
AU  - Golikov, A.
AU  - An, P.
AU  - Kovalyuk, V.
AU  - Goltsman, G.
AU  - Arakelyan, S.
AU  - Evlyukhin, A.
AU  - Kalachev, A.
AU  - Naumov, A.
PY  - 2019
DA  - 2019//
TI  - Effect of silicon oxide coating on a silicon nitride focusing grating coupler efficiency
T2  - EPJ Web Conf.
BT  - EPJ Web Conf.
SP  - 02009
VL  - 220
KW  - grating coupler
KW  - SiO2
AB  - The dependence of the efficiency of the focusing grating couplers on the period and filling factor before and after deposition of the upper silicon oxide layer was experimentally studied. The obtained data are of practical importance for tunable integrated-optical devices based on silicon nitride platform.
SN  - 2100-014X
UR  - https://www.epj-conferences.org/10.1051/epjconf/201922002009
UR  - https://doi.org/10.1051/epjconf/201922002009
DO  - 10.1051/epjconf/201922002009
N1  - exported from refbase (https://db.rplab.ru/refbase/show.php?record=1188), last updated on Sat, 01 May 2021 15:33:58 -0500
ID  - Prokhodtsov_etal2019
ER  -