%0 Conference Proceedings %T Superconducting single-photon detector for integrated waveguide spectrometer %A Korneev, A. %A Kovalyuk, V. %A An, P. %A Golikov, A. %A Zubkova, E. %A Ferrari, S. %A Kahl, O. %A Pernice, W. %A Goltsman, G. %A Naumov, A. V. %A Gladush, M. G. %A Karimullin, K. R. %S EPJ Web Conf. %D 2018 %V 190 %@ 2100-014X %F Korneev_etal2018 %O exported from refbase (https://db.rplab.ru/refbase/show.php?record=1199), last updated on Sat, 01 May 2021 22:45:56 -0500 %X We present our recent achievements in the development of an on-chip spectrometer consisting of arrayed waveguide grating made of Si3N4 waveguides and NbN superconducting single-photon detector. %K SSPD %K SNSPD %K Si3N4 waveguides %K waveguide spectrometer %R 10.1051/epjconf/201819004009 %U https://www.epj-conferences.org/10.1051/epjconf/201819004009 %U https://doi.org/10.1051/epjconf/201819004009 %P 04009