%0 Conference Proceedings %T Superconducting single-photon detectors made of ultra-thin VN films %A Zolotov, P. %A Divochiy, A. %A Vakhtomin, Y. %A Seleznev, V. %A Morozov, P. %A Smirnov, K. %S KnE Energy %D 2018 %V 3 %N 3 %F Zolotov_etal2018 %O exported from refbase (https://db.rplab.ru/refbase/show.php?record=1230), last updated on Sun, 04 Jul 2021 12:35:58 -0500 %X We optimized technology of thin VN films deposition in order to study VN-based superconducting single-photon detectors. Investigation of the main VN film parameters showed that this material has lower resistivity compared to commonly used NbN. Fabricated from obtained films devices showed 100% intrinsic detection efficiency at 900 nm, at the temperature of 1.7 K starting with the bias current of 0.7·I %R 10.18502/ken.v3i3.2016 %U https://knepublishing.com/index.php/KnE-Energy/article/view/2016 %U https://doi.org/10.18502/ken.v3i3.2016 %P 83-89