PT Unknown AU Zolotov, P Divochiy, A Vakhtomin, Y Seleznev, V Morozov, P Smirnov, K TI Superconducting single-photon detectors made of ultra-thin VN films SE KnE Energy PY 2018 BP 83 EP 89 VL 3 IS 3 DI 10.18502/ken.v3i3.2016 AB We optimized technology of thin VN films deposition in order to study VN-based superconducting single-photon detectors. Investigation of the main VN film parameters showed that this material has lower resistivity compared to commonly used NbN. Fabricated from obtained films devices showed 100% intrinsic detection efficiency at 900 nm, at the temperature of 1.7 K starting with the bias current of 0.7·I ER