TY - CONF AU - Zolotov, P. AU - Divochiy, A. AU - Vakhtomin, Y. AU - Seleznev, V. AU - Morozov, P. AU - Smirnov, K. PY - 2018 DA - 2018// TI - Superconducting single-photon detectors made of ultra-thin VN films T2 - KnE Energy BT - KnE Energy SP - 83 EP - 89 VL - 3 IS - 3 AB - We optimized technology of thin VN films deposition in order to study VN-based superconducting single-photon detectors. Investigation of the main VN film parameters showed that this material has lower resistivity compared to commonly used NbN. Fabricated from obtained films devices showed 100% intrinsic detection efficiency at 900 nm, at the temperature of 1.7 K starting with the bias current of 0.7·I UR - https://knepublishing.com/index.php/KnE-Energy/article/view/2016 UR - https://doi.org/10.18502/ken.v3i3.2016 DO - 10.18502/ken.v3i3.2016 N1 - exported from refbase (https://db.rplab.ru/refbase/show.php?record=1230), last updated on Sun, 04 Jul 2021 12:35:58 -0500 ID - Zolotov_etal2018 ER -