%0 Conference Proceedings
%T Development of high-effective superconducting single-photon detectors aimed for mid-IR spectrum range
%A Zolotov, P. I.
%A Divochiy, A. V.
%A Vakhtomin, Y. B.
%A Morozov, P. V.
%A Seleznev, V. A.
%A Smirnov, K. V.
%S J. Phys.: Conf. Ser.
%D 2017
%V 917
%@ 1742-6588
%F Zolotov_etal2017
%O exported from refbase (https://db.rplab.ru/refbase/show.php?record=1233), last updated on Mon, 24 May 2021 23:29:15 -0500
%X We report on development of superconducting single-photon detectors (SSPD) with high intrinsic quantum efficiency in the wavelength range 1.31 – 3.3 μm. By optimization of the NbN film thickness and its compound, we managed to improve detection efficiency of the detectors in the range up to 3.3 μm. Optimized devices showed intrinsic quantum efficiencies as high as 10% at mid-IR range.
%K NbN SSPD
%K SNSPD
%R 10.1088/1742-6596/917/6/062037
%U https://iopscience.iop.org/article/10.1088/1742-6596/917/6/062037
%U https://doi.org/10.1088/1742-6596/917/6/062037
%P 062037