PT Unknown
AU Zolotov, PI
   Divochiy, AV
   Vakhtomin, YB
   Morozov, PV
   Seleznev, VA
   Smirnov, KV
TI Development of high-effective superconducting single-photon detectors aimed for mid-IR spectrum range
SE J. Phys.: Conf. Ser.
PY 2017
BP 062037
VL 917
DI 10.1088/1742-6596/917/6/062037
DE NbN SSPD; SNSPD
AB We report on development of superconducting single-photon detectors (SSPD) with high intrinsic quantum efficiency in the wavelength range 1.31 – 3.3 μm. By optimization of the NbN film thickness and its compound, we managed to improve detection efficiency of the detectors in the range up to 3.3 μm. Optimized devices showed intrinsic quantum efficiencies as high as 10% at mid-IR range.
ER