TY - CONF AU - Zolotov, P. I. AU - Divochiy, A. V. AU - Vakhtomin, Y. B. AU - Morozov, P. V. AU - Seleznev, V. A. AU - Smirnov, K. V. PY - 2017 DA - 2017// TI - Development of high-effective superconducting single-photon detectors aimed for mid-IR spectrum range T2 - J. Phys.: Conf. Ser. BT - J. Phys.: Conf. Ser. SP - 062037 VL - 917 KW - NbN SSPD KW - SNSPD AB - We report on development of superconducting single-photon detectors (SSPD) with high intrinsic quantum efficiency in the wavelength range 1.31 – 3.3 μm. By optimization of the NbN film thickness and its compound, we managed to improve detection efficiency of the detectors in the range up to 3.3 μm. Optimized devices showed intrinsic quantum efficiencies as high as 10% at mid-IR range. SN - 1742-6588 UR - https://iopscience.iop.org/article/10.1088/1742-6596/917/6/062037 UR - https://doi.org/10.1088/1742-6596/917/6/062037 DO - 10.1088/1742-6596/917/6/062037 N1 - exported from refbase (https://db.rplab.ru/refbase/show.php?record=1233), last updated on Mon, 24 May 2021 23:29:15 -0500 ID - Zolotov_etal2017 ER -