%0 Conference Proceedings %T Superconducting detector of IR single-photons based on thin WSi films %A Seleznev, V. A. %A Divochiy, A. V. %A Vakhtomin, Y. B. %A Morozov, P. V. %A Zolotov, P. I. %A Vasil'ev, D. D. %A Moiseev, K. M. %A Malevannaya, E. I. %A Smirnov, K. V. %S J. Phys.: Conf. Ser. %D 2016 %V 737 %@ 1742-6588 %F Seleznev_etal2016 %O exported from refbase (https://db.rplab.ru/refbase/show.php?record=1235), last updated on Tue, 04 May 2021 18:27:05 -0500 %X We have developed the deposition technology of WSi thin films 4 to 9 nm thick with high temperature values of superconducting transition (Tc~4 K). Based on deposed films there were produced nanostructures with indicative planar sizes ~100 nm, and the research revealed that even on nanoscale the films possess of high critical temperature values of the superconducting transition (Tc~3.3-3.7 K) which certifies high quality and homogeneity of the films created. The first experiments on creating superconducting single-photon detectors showed that the detectors' SDE (system detection efficiency) with increasing bias current (I b) reaches a constant value of ~30% (for X=1.55 micron) defined by infrared radiation absorption by the superconducting structure. To enhance radiation absorption by the superconductor there were created detectors with cavity structures which demonstrated a practically constant value of quantum efficiency >65% for bias currents Ib>0.6-Ic. The minimal dark counts level (DC) made 1 s-1 limited with background noise. Hence WSi is the most promising material for creating single-photon detectors with record SDE/DC ratio and noise equivalent power (NEP). %K WSi SSPD %K SNSPD %K NEP %R 10.1088/1742-6596/737/1/012032 %U https://iopscience.iop.org/article/10.1088/1742-6596/737/1/012032 %U https://doi.org/10.1088/1742-6596/737/1/012032 %P 012032