PT Unknown AU Seleznev, VA Divochiy, AV Vakhtomin, YB Morozov, PV Zolotov, PI Vasil'ev, DD Moiseev, KM Malevannaya, EI Smirnov, KV TI Superconducting detector of IR single-photons based on thin WSi films SE J. Phys.: Conf. Ser. PY 2016 BP 012032 VL 737 DI 10.1088/1742-6596/737/1/012032 DE WSi SSPD; SNSPD; NEP AB We have developed the deposition technology of WSi thin films 4 to 9 nm thick with high temperature values of superconducting transition (Tc~4 K). Based on deposed films there were produced nanostructures with indicative planar sizes ~100 nm, and the research revealed that even on nanoscale the films possess of high critical temperature values of the superconducting transition (Tc~3.3-3.7 K) which certifies high quality and homogeneity of the films created. The first experiments on creating superconducting single-photon detectors showed that the detectors' SDE (system detection efficiency) with increasing bias current (I b) reaches a constant value of ~30% (for X=1.55 micron) defined by infrared radiation absorption by the superconducting structure. To enhance radiation absorption by the superconductor there were created detectors with cavity structures which demonstrated a practically constant value of quantum efficiency >65% for bias currents Ib>0.6-Ic. The minimal dark counts level (DC) made 1 s-1 limited with background noise. Hence WSi is the most promising material for creating single-photon detectors with record SDE/DC ratio and noise equivalent power (NEP). ER